公开(公告)号：US20190079039A1

公开(公告)日：2019-03-14

申请号：US16178599

申请日：2018-11-02

Applicant: Industrial Technology Research Institute

Inventor： Sih-Han Li ,  Chih-Sheng Lin ,  Kuan-Wei Chen ,  Erh-Hao Chen ,  Shyh-Shyuan Sheu

IPC: G01N27/12

Abstract: A method of manufacturing a sensor device is provided. In the method, sensing electrodes are formed on a substrate, a sensing material layer is formed on the sensing electrodes. The sensing material layer is etched to form a first nanowire sensing region, a second nanowire sensing region and a third nanowire sensing region respectively between every two sensing electrodes of the sensing electrodes. A dielectric layer is formed to cover the first nanowire sensing region, the second nanowire sensing region and the third nanowire sensing region, and the first nanowire sensing region and the third nanowire sensing region are exposed.

公开(公告)号：US20180238822A1

公开(公告)日：2018-08-23

申请号：US15955691

申请日：2018-04-18

Applicant: Industrial Technology Research Institute

Inventor： Kuan-Wei Chen ,  Chih-Sheng Lin ,  Erh-Hao Chen ,  Sih-Han Li ,  Shyh-Shyuan Sheu

IPC: G01N27/12

CPC classification number: G01N27/127 ,  G01N27/122 ,  G01N33/0031

Abstract: A gas sensing apparatus including a gas sensor, a gas determining circuit and a gas database is provided. The gas sensor includes at least two nanowire sensors. The gas sensor is configured to sense multiple gases and output a plurality of sensing signals. The gas determining circuit is coupled to the gas sensor. The gas determining circuit is configured to receive the sensing signals and determine types of the gases according to reference data and the sensing signals. The gas database is coupled to the gas determining circuit. The gas database stores the reference data and outputs the reference data to the gas determining circuit. Each of the nanowire sensors includes at least one nanowire. Structural properties of the nanowires are different.

公开(公告)号：US10324054B2

公开(公告)日：2019-06-18

申请号：US16178599

申请日：2018-11-02

Applicant: Industrial Technology Research Institute

Inventor： Sih-Han Li ,  Chih-Sheng Lin ,  Kuan-Wei Chen ,  Erh-Hao Chen ,  Shyh-Shyuan Sheu

IPC: G01N27/12

Abstract: A method of manufacturing a sensor device is provided. In the method, sensing electrodes are formed on a substrate, a sensing material layer is formed on the sensing electrodes. The sensing material layer is etched to form a first nanowire sensing region, a second nanowire sensing region and a third nanowire sensing region respectively between every two sensing electrodes of the sensing electrodes. A dielectric layer is formed to cover the first nanowire sensing region, the second nanowire sensing region and the third nanowire sensing region, and the first nanowire sensing region and the third nanowire sensing region are exposed.

公开(公告)号：US20170122892A1

公开(公告)日：2017-05-04

申请号：US14961906

申请日：2015-12-08

Applicant: Industrial Technology Research Institute

Inventor： Sih-Han Li ,  Chih-Sheng Lin ,  Kuan-Wei Chen ,  Erh-Hao Chen ,  Shyh-Shyuan Sheu

IPC: G01N27/12

CPC classification number: G01N27/121 ,  G01N27/127

Abstract: A sensor device and a method of manufacturing the same are provided. The sensor device includes a substrate, a plurality of sensing electrodes, a humidity nanowire sensor, a temperature nanowire sensor, and a gas nanowire sensor. The sensing electrodes are formed on the substrate, and the humidity, the temperature and the gas nanowire sensors are also on the substrate. The humidity nanowire sensor includes an exposed first nanowire sensing region, the temperature nanowire sensor includes a second nanowire sensing region, and the gas nanowire sensor includes a third nanowire sensing region.

公开(公告)号：US10156535B2

公开(公告)日：2018-12-18

申请号：US14961906

申请日：2015-12-08

Applicant: Industrial Technology Research Institute

Inventor： Sih-Han Li ,  Chih-Sheng Lin ,  Kuan-Wei Chen ,  Erh-Hao Chen ,  Shyh-Shyuan Sheu

IPC: G01N27/12

Abstract: A sensor device and a method of manufacturing the same are provided. The sensor device includes a substrate, a plurality of sensing electrodes, a humidity nanowire sensor, a temperature nanowire sensor, and a gas nanowire sensor. The sensing electrodes are formed on the substrate, and the humidity, the temperature and the gas nanowire sensors are also on the substrate. The humidity nanowire sensor includes an exposed first nanowire sensing region, the temperature nanowire sensor includes a second nanowire sensing region, and the gas nanowire sensor includes a third nanowire sensing region.

公开(公告)号：US20170115248A1

公开(公告)日：2017-04-27

申请号：US14958856

申请日：2015-12-03

Applicant: Industrial Technology Research Institute

Inventor： Chih-Sheng Lin ,  Erh-Hao Chen ,  Sih-Han Li ,  Kuan-Wei Chen ,  Shyh-Shyuan Sheu

IPC: G01N27/12

CPC classification number: G01N27/127

Abstract: A gas sensing apparatus including a gas sensor, a gas determining circuit and a gas database is provided. The gas sensor includes at least two nanowire sensors. The gas sensor is configured to sense multiple gases and output a plurality of sensing signals. The gas determining circuit is coupled to the gas sensor. The gas determining circuit is configured to receive the sensing signals and determine types of the gases according to reference data and the sensing signals. The gas database is coupled to the gas determining circuit. The gas database stores the reference data and outputs the reference data to the gas determining circuit. Each of the nanowire sensors includes at least one nanowire. Structural properties of the nanowires are different.

公开(公告)号：US20140238725A1

公开(公告)日：2014-08-28

申请号：US13778132

申请日：2013-02-27

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Erh-Hao Chen ,  Cha-Hsin Lin ,  Tzu-Kun Ku

IPC: H05K1/02 ,  H05K3/26

CPC classification number: H05K3/107 ,  H05K3/045 ,  H05K3/247 ,  H05K2201/0376 ,  H05K2203/025

Abstract: A method of flattening surface of conductive structure including a substrate, a dielectric layer on the substrate, and a conductive line formed in the dielectric layer is provided. A surface of the conductive line has a recess. A cover layer is formed on the substrate. A mechanical polishing process is performed to remove a portion of the cover layer. A remaining cover layer fills and levels the recess.

Abstract translation: 提供了包括基板，基板上的电介质层和形成在电介质层中的导电线的导电结构的表面平坦化的方法。 导线的表面具有凹部。 在基板上形成覆盖层。 执行机械抛光工艺以去除覆盖层的一部分。 剩余的覆盖层填充并平整凹部。