公开(公告)号：US20240319165A1

公开(公告)日：2024-09-26

申请号：US18575254

申请日：2022-11-09

Applicant: ILLUMINA, INC.

Inventor： Xu LIU ,  Sharis MINASSIAN ,  Boyan BOYANOV ,  Rean Silke MUSA ,  Arvin EMADI

IPC: G01N33/487

CPC classification number: G01N33/48721

Abstract: Systems for sequencing biopolymers and methods of manufacturing the systems are disclosed. In one example, such a system may include an application specific integrated circuit (ASIC) layer, a post array layer beneath the AISC layer, and a nanopore layer above the ASIC layer. The ASIC layer is formed by building active circuitry on a front side of a semiconductor wafer and polishing a back side of the semiconductor wafer. The post array layer is formed by etching a front side of a support substrate and the post array layer provides mechanical support to the ASIC layer. The nanopore layer contains membrane and nanopores. The membrane inhibits passage of water-soluble molecules and the nanopores permit passage of water-soluble molecules. In some embodiments, the system may have short through-substrate vias extending through the ASIC layer. In some embodiments, wafer bonding processes may be used when fabricating the system.

公开(公告)号：US20240293816A1

公开(公告)日：2024-09-05

申请号：US18574214

申请日：2022-06-30

Applicant: ILLUMINA, INC.

Inventor： Rean Silke Musa ,  Anthony Flannery ,  Boyan Boyanov ,  Nigel COBURN ,  Sharis MINASSIAN

IPC: B01L3/00 ,  C12Q1/6869

CPC classification number: B01L3/502761 ,  C12Q1/6869 ,  B01L2300/0645 ,  B01L2300/0829 ,  B01L2300/0893 ,  B01L2400/0427 ,  B01L2400/046

Abstract: Devices for sequencing biopolymers, methods of manufacturing the devices, and methods of using the devices are disclosed. In one example, such a device has a nanopore and a horizontal nanochannel. In some embodiments, the horizontal nanochannel may take a tortuous path. In some embodiments, such a device includes gas or air bubble generators or pressure pulse generators to block or unblock the horizontal nanochannel.