Machine suitable for placing a component on a substrate, as well as a method therefor
    1.
    发明申请
    Machine suitable for placing a component on a substrate, as well as a method therefor 审中-公开
    适于将元件放置在基底上的机器及其方法

    公开(公告)号:US20060059502A1

    公开(公告)日:2006-03-16

    申请号:US10541984

    申请日:2004-01-12

    CPC classification number: H05K13/0812 H05K13/0818 H05K13/089

    Abstract: Machine (1) comprising a placement element (7) connected to an imaging device (6), and comprising an optical system (4) for detecting the position of a component (16) relative to the placement element (7) by means of the imaging device (6). The optical system (4) comprises at least one marking element (11). The marking element (11) and the component (16) can be displayed simultaneously by means of the optical system (4) in an image (17) to be made by means of the imaging device (6).

    Abstract translation: 机器(1)包括连接到成像装置(6)的放置元件(7),并且包括用于通过所述光学系统检测元件(16)相对于所述放置元件(7)的位置的光学系统(4) 成像装置(6)。 光学系统(4)包括至少一个标记元件(11)。 标记元件(11)和部件(16)可以通过借助于成像装置(6)制成的图像(17)中的光学系统(4)同时显示。

    Arrangement for operating a laser diode
    2.
    发明授权
    Arrangement for operating a laser diode 失效
    用于操作激光二极管的布置

    公开(公告)号:US5185643A

    公开(公告)日:1993-02-09

    申请号:US804060

    申请日:1991-12-09

    CPC classification number: H01S5/0687 H01S5/02415 H01S5/0612 H01S5/06837

    Abstract: The invention is directed to an arrangement for operating a laser diode. A two-stage stabilization circuit is provided for stabilizing the wavelength of a laser diode to exactly defined values for its use in distance measuring interferometers. In addition to presetting the operating parameters of current and temperature of the laser diode, the emitted wavelength of the laser diode is controlled to a predetermined transmission maximum of a Fabry-Perot interferometer. At switch-on, a control program can be called up and compute new values for the operating parameters premised on the last measured values of the operating parameters and initially determined and stored coefficients. In this way, the program always reliably sets the wavelength of the laser diode to the same transmission maximum.

    Abstract translation: 本发明涉及一种用于操作激光二极管的装置。 提供了一个两级稳定电路,用于将激光二极管的波长稳定在精确定义的值上,用于测距干涉仪。 除了预设激光二极管的电流和温度的操作参数之外,激光二极管的发射波长被控制到法布里 - 珀罗干涉仪的预定透射最大值。 在接通时,可以调用控制程序,并计算操作参数的新值,其基于操作参数的最后测量值和初始确定和存储的系数。 以这种方式,程序总是可靠地将激光二极管的波长设置为相同的传输最大值。

    Ophthalmologic apparatus
    3.
    发明授权
    Ophthalmologic apparatus 失效
    眼科仪器

    公开(公告)号:US5067951A

    公开(公告)日:1991-11-26

    申请号:US404099

    申请日:1989-09-07

    Applicant: Peter Greve

    Inventor: Peter Greve

    CPC classification number: A61F9/008 A61F9/00821 A61F2009/0035

    Abstract: The invention is directed to an ophthalmologic apparatus which includes a laser module which permits microsurgery with pulsed radiation as well as coagulation therapy by means of continuous-wave radiation.

    Abstract translation: 本发明涉及一种眼科装置,其包括激光模块,其允许用脉冲辐射进行显微外科手术以及通过连续波辐射进行凝固治疗。

    Manipulator for use with a surgical microscope
    4.
    发明授权
    Manipulator for use with a surgical microscope 失效
    手术器用于手术显微镜

    公开(公告)号:US4607919A

    公开(公告)日:1986-08-26

    申请号:US654861

    申请日:1984-09-26

    CPC classification number: B25J7/00 G02B21/0012 Y10T74/20201 Y10T74/206

    Abstract: A manipulator is provided for a surgical microscope in order to deflect a laser beam on the viewed operating area, the movement of a handle being transmitted via a lever mechanism to the movement of a mirror which reflects the laser beam to a point and via a path within the viewed operating area. The sensitivity of transmitted motion can be adapted to the selected magnification of the surgical microscope by changing the length of a transmission lever in order to change its point of motion pick-off from the handle.

    Abstract translation: 为手术显微镜提供了一种操纵器,以便将激光束偏转在所观察的操作区域上,手柄的运动经由杠杆机构传递到反射镜的运动,反射镜的运动将激光束反射到一点并且经由路径 在观看的操作区域内。 透射运动的灵敏度可以通过改变传动杆的长度来改变手术显微镜的选定放大倍数,以便从手柄改变其运动点。

    Spectroscopic analysis apparatus and method with excitation system and focus monitoring system
    5.
    发明申请
    Spectroscopic analysis apparatus and method with excitation system and focus monitoring system 失效
    光谱分析装置及方法与激励系统和焦点监测系统

    公开(公告)号:US20060258942A1

    公开(公告)日:2006-11-16

    申请号:US10547971

    申请日:2004-03-01

    CPC classification number: A61B5/0059 A61B5/0068 G01J3/44 G01N21/65 G02B21/241

    Abstract: The present invention relates to an analysis apparatus, in particular a spectroscopic analysis apparatus, for analyzing an object, such as blood of a patient, and a corresponding analysis method. To aim the confocal detection volume inside a blood vessel orthogonal polarized spectral imaging (OPSI) is used to locate blood capillaries in the skin. An imaging system (img) with slightly shifted imaging planes (i1, i2) for OPS imaging of blood vessels is proposed to provide auto-focusing. The confocal Raman detection plane (dp) is located in between these two imaging planes (i1, i2). Based on measured amount of defocus for the imaging planes (i1, i2), the focusing of the imaging system (img), the excitation system (exs) for exciting the target region and the detection system (dsy) are adjusted such that the difference of the amount of defocus equals a predetermined amount so that the confocal detection plane (dp) is located inside the blood vessel (V). Thus, continuous auto-focusing with high accuracy can be achieved. The invention relates also to an optical tracking system for continuously tracking a point of a moving object (obj).

    Abstract translation: 本发明涉及用于分析患者血液等物体的分析装置,特别是光谱分析装置以及相应的分析方法。 为了瞄准血管内的共焦检测体积,使用正交偏振光谱成像(OPSI)来定位皮肤中的毛细血管。 提出了一种具有稍微偏移的成像平面(i 1,i 2)用于血管的OPS成像的成像系统(img),以提供自动聚焦。 共焦拉曼检测平面(dp)位于这两个成像平面(i 1,i 2)之间。 基于测量的成像平面(i 1,i 2)的散焦量,调整成像系统(img)的聚焦,用于激发目标区域的激发系统(exs)和检测系统(dsy),使得 散焦量的差别等于预定量,使得共焦检测平面(dp)位于血管(V)内。 因此,可以实现高精度的连续自动聚焦。 本发明还涉及用于连续跟踪移动物体(obj)的点的光学跟踪系统。

    Particle detection device, lithographic apparatus and device manufacturing method
    6.
    发明申请
    Particle detection device, lithographic apparatus and device manufacturing method 失效
    粒子检测装置,光刻设备及器件制造方法

    公开(公告)号:US20060072107A1

    公开(公告)日:2006-04-06

    申请号:US10957752

    申请日:2004-10-05

    CPC classification number: G03F7/70916 G01N21/94 G01N21/956 G03F7/7085

    Abstract: To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiation is received from a ghost particle, not all of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a contaminating particle results in all signals having a level above a threshold level. Thus, it may be determined with a high accuracy whether a particle or a ghost particle is redirecting radiation towards the detector system.

    Abstract translation: 为了实现粒子和鬼粒子之间的区分,提出了一种检测器系统。 检测器系统被配置为输出对应于入射在检测器系统上的辐射强度的至少两个检测器信号。 如果从重影颗粒接收到辐射,则并非所有至少两个检测器信号都具有高于预定阈值水平的水平,而从污染颗粒接收的辐射导致所有信号具有高于阈值水平的水平。 因此,可以高精度地确定颗粒或重影颗粒是否朝向检测器系统重定向辐射。

    Cooling arrangement for a semiconductor pump source
    7.
    发明授权
    Cooling arrangement for a semiconductor pump source 失效
    半导体泵浦源的冷却装置

    公开(公告)号:US5031184A

    公开(公告)日:1991-07-09

    申请号:US545707

    申请日:1990-06-29

    Abstract: The invention is directed to a cooling arrangement for a semiconductor pump source which develops heat during operation. The cooling arrrangement includes a heat sink defining a seat for accommodating the pump source thereon and a cooling channel is formed in the heat sink for conducting a coolant therethrough to remove a major portion of the heat. A Peltier device is connected to the heat sink for finely controlling the temperature of the heat sink so as to permit the semiconductor pump source to emit radiation having a predetermined optional wavelength.

    Abstract translation: 本发明涉及用于在运行期间产生热量的半导体泵浦源的冷却装置。 冷却布置包括限定用于在其上容纳泵浦源的座的散热器,并且在散热器中形成冷却通道以将冷却剂引导通过其中以去除大部分热量。 珀耳帖装置连接到散热器,用于精细地控制散热器的温度,以便允许半导体泵浦源发射具有预定可选波长的辐射。

    Arrangement for correcting the position of a laser beam guided by means
of an articulated optical system
    8.
    发明授权
    Arrangement for correcting the position of a laser beam guided by means of an articulated optical system 失效
    用于校正通过铰接式光学系统引导的激光束的位置的布置

    公开(公告)号:US4659916A

    公开(公告)日:1987-04-21

    申请号:US701168

    申请日:1985-02-13

    Abstract: The invention is directed to an arrangement for correcting the position of a laser beam guided by means of an articulated optical system. This system includes a position-sensitive detector at its output end for generating a signal which is passed to an adjustable mirror arranged on the input end. The adjustable mirror compensates for an excursion of the laser beam occurring as a result of faults in the guide means and bearings of the articulated arm. Prior to entering the articulated optical system, the laser beam or parallelly guided pilot beam is modulated with respect to the beam direction with a small amplitude by another adjustable mirror. The detector signal component corresponding to the modulation frequency is passed to an electronic circuit which determines the directional relationships between the excursion of the laser beam at the output of the articulated arm and the follow-up movement of the adjustable mirror for deflecting the beam. This determination is achieved independently of the amount of rotation of the rotational bearings.

    Abstract translation: 本发明涉及一种用于校正由关节式光学系统引导的激光束的位置的装置。 该系统包括在其输出端的位置敏感检测器,用于产生传递到布置在输入端上的可调节反射镜的信号。 可调节镜可补偿由于引导装置和关节臂的轴承中的故障而产生的激光束的偏移。 在进入关节式光学系统之前,激光束或平行引导的导向光束相对于光束方向以另一个可调节镜的小幅度被调制。 对应于调制频率的检测器信号分量被传递到电子电路,该电子电路确定在铰接臂的输出处的激光束的偏移与用于偏转光束的可调节镜的后续运动之间的方向关系。 该确定是独立于旋转轴承的旋转量而实现的。

    Particle detection device, lithographic apparatus and device manufacturing method
    9.
    发明申请
    Particle detection device, lithographic apparatus and device manufacturing method 失效
    粒子检测装置,光刻设备及器件制造方法

    公开(公告)号:US20060072108A1

    公开(公告)日:2006-04-06

    申请号:US11242146

    申请日:2005-10-04

    CPC classification number: G03F7/70916 G01N21/94 G01N21/956 G03F7/7085

    Abstract: To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at least two detector signals corresponding to intensities of radiation being incident on different parts of the detector system or the detector system outputs at least two detector signals corresponding to intensities of radiation with different wavelengths being incident on the detector system. If radiation is received from a ghost particle, not each of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a particle results in the signals having substantially a same level above a threshold level. The detector system may include a radiation detector device configured to generate the first detector signal in response to radiation incident on at least one predetermined part of the radiation detector device and a radiation blocking assembly configured to prevent radiation not originating from a particle from being incident on the predetermined part of the detector device.

    Abstract translation: 为了能够区分粒子和重影粒子,检测器系统从实际粒子的辐射中解析来自重影粒子的辐射。 检测器系统输出对应于入射在检测器系统的不同部分上的辐射强度的至少两个检测器信号,或者检测器系统输出对应于不同波长的辐射强度入射在检测器系统上的至少两个检测器信号。 如果从重影粒子接收到辐射,则并非所述至少两个检测器信号中的每一个具有高于预定阈值电平的电平,而从粒子接收的辐射导致信号具有高于阈值电平的基本上相同的电平。 检测器系统可以包括辐射检测器装置,其被配置为响应于入射到辐射检测器装置的至少一个预定部分上的辐射而产生第一检测器信号;以及辐射阻挡组件,其被配置为防止不是源自颗粒的辐射被入射 检测器装置的预定部分。

    Solid state laser
    10.
    发明授权
    Solid state laser 失效
    固体激光

    公开(公告)号:US5052010A

    公开(公告)日:1991-09-24

    申请号:US493770

    申请日:1990-03-15

    CPC classification number: H01S3/025 H01S3/042 H01S3/0931 H01S3/0407

    Abstract: The invention is directed to a solid state laser wherein the pump sources are connected with holding parts and can be seated into a predetermined and reproducible position with mechanical guides and stops. In this way, an exchange of the pump sources is possible without a new adjustment or a readjustment.

    Abstract translation: 本发明涉及一种固体激光器,其中泵浦源与保持部件连接,并且可以用机械引导件和停止件就座到预定和可重现的位置。 以这种方式,可以在没有新的调整或重新调整的情况下更换泵浦源。

Patent Agency Ranking