公开(公告)号：US20170345614A1

公开(公告)日：2017-11-30

申请号：US15520953

申请日：2015-10-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshinobu KIMURA ,  Natsuki TSUNO ,  Toshihide AGEMURA ,  Takeshi OGASHIWA ,  Junichiro TOMIZAWA

IPC: H01J37/22 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/24507

Abstract: There is provided a charged particle beam apparatus capable of obtaining a high SN ratio with a small electron irradiation amount. The charged particle beam apparatus includes a charged particle detection device. The charged particle detection device detects an analog pulse waveform signal (110) in a detection of emitted electrons (1 event) when one primary electron enters a sample, converts the analog pulse waveform signal (110) into a digital signal (111), perform a wave height discrimination (112) with the use of a unit peak corresponding electron, and outputs the digital signal (111) as a multilevel count value.