公开(公告)号：US20230420214A1

公开(公告)日：2023-12-28

申请号：US18035589

申请日：2020-11-16

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo KOMATSUZAKI ,  Shuntaro ITO ,  Hiroyuki CHIBA ,  Takashi SHIDARA ,  Yoshinobu HOSHINO ,  Hirofumi SATO

IPC: H01J37/24 ,  H01J37/22

CPC classification number: H01J37/243 ,  H01J37/222

Abstract: An input and output device includes: an instruction analysis unit configured to generate a conversation document in which a conversation uttered by a user is converted into character string data and recognize, based on the conversation document, a conversation intention of the user including an instruction to an image acquisition device; a history retention unit configured to record, as history information, the conversation document, the conversation intention, and a response of the image acquisition device to the instruction to the image acquisition device; a difference analysis unit configured to divide a report creation period using a timing when the user issues, to the image acquisition device, an instruction including an intention to save a captured image as a boundary and output report creation information in which history information divided for each of the report creation periods, and a captured image and a differential condition corresponding to the history information are associated with each other; and a report retention unit configured to create a report for each of the report creation periods based on the report creation information and record the created report.

公开(公告)号：US20220230844A1

公开(公告)日：2022-07-21

申请号：US17608651

申请日：2019-05-23

Applicant: Hitachi High-Tech Corporation

Inventor： Takashi DOBASHI ,  Hirokazu TAMAKI ,  Hiromi MISE ,  Shuntaro ITO

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J37/22

Abstract: A charged particle beam apparatus includes a movement mechanism, a particle source, an optical element, a detector, and a control mechanism configured to control, based on an observation condition, the movement mechanism, the particle source, the optical element, and the detector. The control mechanism is configured to acquire a diffraction pattern image including a plurality of Kikuchi lines as a comparison image after inclining the movement mechanism by a first angle, evaluate an error between an inclination angle of the sample and a target inclination angle using a reference image of a reference diffraction pattern and the comparison image, and control inclination of the movement mechanism based on an evaluation result.

公开(公告)号：US20220230840A1

公开(公告)日：2022-07-21

申请号：US17595807

申请日：2019-05-29

Applicant: Hitachi High-Tech Corporation

Inventor： Shuntaro ITO ,  Hiromi MISE

IPC: H01J37/24

Abstract: A charged particle beam device includes a charged particle beam device main body, a computer configured to control the charged particle beam device main body, including a CPU and a DRAM, and including software for controlling the charged particle beam device main body, a monitoring unit configured to monitor a resource usage status in the computer, an allocation availability determination unit configured to determine whether or not a resource for executing processing required by the software is allocatable in the computer according to a monitoring result of the monitoring unit, and a notification unit configured to notify, when the determination of the allocation availability determination unit is negative, information indicating that the determination is negative.