公开(公告)号：US20210175047A1

公开(公告)日：2021-06-10

申请号：US16771121

申请日：2017-12-21

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroki KANNAMI ,  Hironori ITABASHI ,  Ichiro FUJIMURA

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/147

Abstract: In order to control a charge amount on a sample surface to a desired value before calculating a frame integration image, the invention provides a charged particle beam device including: a charged particle beam source configured to irradiate a sample with a charged particle beam; a deflector configured to scan an observation region of the sample with the charged particle beam; a detector configured to detect a charged particle emitted from the sample due to scanning with the charged particle beam; an image generation unit configured to generate a frame image of the observation region based on an observation signal output from the detector; and a scanning suspension time setting unit configured to set a scanning suspension time, which is a time during which scanning of the observation region with the charged particle beam is suspended after a frame image is generated, in which the image generation unit calculates a frame integration image by integrating frame images generated with the scanning suspension time interposed.

公开(公告)号：US20230260739A1

公开(公告)日：2023-08-17

申请号：US18012478

申请日：2020-07-13

Applicant: Hitachi High-Tech Corporation

Inventor： Keisuke TANUMA ,  Masato KAMIO ,  Hironori ITABASHI ,  Hiroki KANNAMI ,  Yusuke SEKI ,  Takumi UEZONO ,  Mitsuhiro NAKAMURA

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/28 ,  H01J37/1474 ,  H01J2237/1536

Abstract: It is aimed to properly correct the various types of distortion without a reduction in observation throughput. The present disclosure provides a charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam and includes: a deflection coil that scans the charged particle beam on the specimen; a D/A converter that converts a digital scan waveform into an analog scan waveform and outputs the analog scan waveform to the deflection coil to drive the deflection coil; and a scan waveform generation unit that generates a digital scan waveform and outputs the digital scan waveform to the D/A converter, in which the scan waveform generation unit has a basic LUT that stores parameters for correcting the digital scan waveform and includes a correction circuit that corrects a distortion characteristic of the deflection coil