Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
    1.
    发明授权
    Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system 有权
    测量系统被配置为执行被配置成为测量系统提供照明的样本和照明子系统的测量

    公开(公告)号:US07869040B1

    公开(公告)日:2011-01-11

    申请号:US12184419

    申请日:2008-08-01

    IPC分类号: G01J4/00

    摘要: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

    摘要翻译: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外,则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中,则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统,该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线,紫外线,可见光和近红外波长方案。

    Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry
    2.
    发明授权
    Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry 有权
    吹扫气体流量控制用于使用椭偏仪和反射计的高精度胶片测量

    公开(公告)号:US07755764B2

    公开(公告)日:2010-07-13

    申请号:US12019592

    申请日:2008-01-24

    IPC分类号: G01N21/55

    摘要: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

    摘要翻译: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中,用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见(UV-Vis)范围内具有真空紫外(VUV)范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时,净化气体的流量被调节。 该系统包括光源,照明光学器件,收集光学器件,检测器,吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

    Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
    3.
    发明授权
    Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system 失效
    测量系统被配置为执行被配置成为测量系统提供照明的样本和照明子系统的测量

    公开(公告)号:US07408641B1

    公开(公告)日:2008-08-05

    申请号:US11058153

    申请日:2005-02-14

    IPC分类号: G01J4/00

    摘要: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

    摘要翻译: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外,则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中,则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统,该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线,紫外线,可见光和近红外波长方案。

    PURGE GAS FLOW CONTROL FOR HIGH-PRECISION FILM MEASUREMENTS USING ELLIPSOMETRY AND REFLECTOMETRY
    4.
    发明申请
    PURGE GAS FLOW CONTROL FOR HIGH-PRECISION FILM MEASUREMENTS USING ELLIPSOMETRY AND REFLECTOMETRY 有权
    用于高精度电泳测量的气体流量控制使用ELLIPSOMETRY和REFLECTOMETRY

    公开(公告)号:US20080180698A1

    公开(公告)日:2008-07-31

    申请号:US12019592

    申请日:2008-01-24

    IPC分类号: G01B11/06 G01J1/42

    摘要: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

    摘要翻译: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中,用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见(UV-Vis)范围内具有真空紫外(VUV)范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时,净化气体的流量被调节。 该系统包括光源,照明光学器件,收集光学器件,检测器,吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

    Apparatus and method for modification of telecommunication video content
    5.
    发明授权
    Apparatus and method for modification of telecommunication video content 有权
    电视视频内容修改的装置和方法

    公开(公告)号:US08982179B2

    公开(公告)日:2015-03-17

    申请号:US13527774

    申请日:2012-06-20

    IPC分类号: H04N7/14

    摘要: A method that incorporates teachings of the subject disclosure may include, for example, utilizing a system including at least one processor for determining a video modification plan for a received video stream of a video call session according to the at least one party associated with the video call session, modifying, by the system, a plurality of background images of the received video stream according to the video modification plan to generate a plurality of modified background images, and generating, by the system, a modified video stream according to the plurality of modified background images. Other embodiments are disclosed.

    摘要翻译: 结合本公开的教导的方法可以包括例如利用包括至少一个处理器的系统,用于根据与视频相关联的至少一个方确定视频呼叫会话的接收视频流的视频修改计划 呼叫会话,由系统修改根据该视频修改方案的接收到的视频流的多个背景图像,以生成多个修改后的背景图像,并且由该系统根据多个修改图像生成修改的视频流 修改背景图片。 公开了其他实施例。

    Method and apparatus for locating load-balanced facilities
    6.
    发明授权
    Method and apparatus for locating load-balanced facilities 有权
    用于定位负载平衡设施的方法和装置

    公开(公告)号:US08949842B2

    公开(公告)日:2015-02-03

    申请号:US12347810

    申请日:2008-12-31

    IPC分类号: G06F9/50 H04L12/24

    摘要: A method and apparatus for providing a facility location plan for a network with a V-shaped facility cost are disclosed. For example, the method receives an event from a queue, wherein the event comprises an open event or a tight event. The method connects a plurality of adjacent clients to a facility, if the event comprises the open event, and adds a new client-facility edge to a graph comprising a plurality of client-facility edges, if the event comprises the tight event.

    摘要翻译: 公开了一种用于提供具有V形设备成本的网络的设施位置计划的方法和装置。 例如,该方法从队列接收事件,其中事件包括打开事件或紧急事件。 如果事件包括打开事件,则该方法将多个相邻客户端连接到设施,并且如果事件包括紧密事件,则将新的客户机设施边缘添加到包括多个客户机设施边缘的图形中。

    System and method of bilateral image filtering
    7.
    发明授权
    System and method of bilateral image filtering 有权
    双边图像滤波的系统和方法

    公开(公告)号:US08737735B2

    公开(公告)日:2014-05-27

    申请号:US13524140

    申请日:2012-06-15

    IPC分类号: G06K9/00

    摘要: A method includes generating a first principle bilateral filtered image component from a source image. The first principle bilateral filtered image component corresponds to a second pixel value of a set, the second pixel value greater than or equal to a first pixel value. The method includes selectively updating a result pixel of a result image based on the first principle bilateral filtered image component and deallocating the first principle bilateral filtered image component. After deallocating the first principle bilateral filtered image component, a second principle bilateral filtered image component is generated from the source image. The second principle bilateral filtered image component corresponds to a third pixel value. The third pixel value is greater than the second pixel value. The third pixel value is less than or equal to a fourth pixel value. The result pixel is selectively updated based on the second principle bilateral filtered image component.

    摘要翻译: 一种方法包括从源图像生成第一原理双边滤波图像分量。 第一原理双边滤波图像分量对应于一组的第二像素值,第二像素值大于或等于第一像素值。 该方法包括基于第一原理双边滤波图像分量选择性地更新结果图像的结果像素并且取消分配第一原理双边滤波图像分量。 在解除分配第一原理双边滤波图像分量之后,从源图像生成第二原理双边滤波图像分量。 第二原理双边滤波图像分量对应于第三像素值。 第三像素值大于第二像素值。 第三像素值小于或等于第四像素值。 基于第二原理双边滤波图像分量选择性地更新结果像素。

    SYSTEM AND METHOD OF BILATERAL IMAGE FILTERING
    8.
    发明申请
    SYSTEM AND METHOD OF BILATERAL IMAGE FILTERING 有权
    双向图像滤波系统与方法

    公开(公告)号:US20130336585A1

    公开(公告)日:2013-12-19

    申请号:US13524140

    申请日:2012-06-15

    IPC分类号: G06K9/40

    摘要: A method includes generating a first principle bilateral filtered image component from a source image. The first principle bilateral filtered image component corresponds to a second pixel value of a set, the second pixel value greater than or equal to a first pixel value. The method includes selectively updating a result pixel of a result image based on the first principle bilateral filtered image component and deallocating the first principle bilateral filtered image component. After deallocating the first principle bilateral filtered image component, a second principle bilateral filtered image component is generated from the source image. The second principle bilateral filtered image component corresponds to a third pixel value. The third pixel value is greater than the second pixel value. The third pixel value is less than or equal to a fourth pixel value. The result pixel is selectively updated based on the second principle bilateral filtered image component.

    摘要翻译: 一种方法包括从源图像生成第一原理双边滤波图像分量。 第一原理双边滤波图像分量对应于一组的第二像素值,第二像素值大于或等于第一像素值。 该方法包括基于第一原理双边滤波图像分量选择性地更新结果图像的结果像素并且取消分配第一原理双边滤波图像分量。 在解除分配第一原理双边滤波图像分量之后,从源图像生成第二原理双边滤波图像分量。 第二原理双边滤波图像分量对应于第三像素值。 第三像素值大于第二像素值。 第三像素值小于或等于第四像素值。 基于第二原理双边滤波图像分量选择性地更新结果像素。

    Global registration of multiple 3D point sets via optimization on a manifold
    9.
    发明授权
    Global registration of multiple 3D point sets via optimization on a manifold 有权
    通过在歧管上进行优化来全局注册多个3D点集

    公开(公告)号:US08538138B2

    公开(公告)日:2013-09-17

    申请号:US12893404

    申请日:2010-09-29

    IPC分类号: G06K9/00 G06T15/00

    摘要: A method for registering multiple 3D point sets by determining optimal relative positions and orientations of the 3D point sets. Initial values are determined for the rotation matrices corresponding to the relative orientations of reference frames of the 3D point sets. A registration error cost function is optimized on a product manifold of all of the rotation matrices to determine optimal values of the rotation matrices. The optimal values of the rotation matrices are used to determine optimal values for translation vectors corresponding to the relative positions of the reference frames of the 3D point sets. The 3D point sets are registered on a common reference frame using the optimal rotation matrices and the optimal translation vectors.

    摘要翻译: 一种用于通过确定3D点集合的最佳相对位置和取向来登记多个3D点集的方法。 对于与3D点集的参考帧的相对取向相对应的旋转矩阵确定初始值。 在所有旋转矩阵的乘积歧管上优化注册误差成本函数,以确定旋转矩阵的最佳值。 旋转矩阵的最佳值用于确定对应于3D点集的参考帧的相对位置的平移向量的最优值。 使用最佳旋转矩阵和最优平移向量将3D点集登记在公共参考帧上。

    System and Method of Image Upsampling
    10.
    发明申请
    System and Method of Image Upsampling 有权
    图像上采样的系统和方法

    公开(公告)号:US20130121568A1

    公开(公告)日:2013-05-16

    申请号:US13296417

    申请日:2011-11-15

    IPC分类号: G06K9/32

    CPC分类号: G06T3/4053

    摘要: A method includes receiving an image having a first resolution and generating an upsampled image having a second resolution based on the image. A multi-dimensional data structure corresponding to a multi-dimensional image space is generated from the upsampled image. Each node of the data structure is determined based on a weighted sum of values of one or more pixels in the upsampled image. Each of the one or more pixels corresponds to a pixel in the received image and is located within a region of the image space having a vertex defined by the node. A filter modifies the values of the nodes and a second upsampled image is generated based on the modified values of the nodes. Each pixel of the second upsampled image not corresponding to a pixel in the received image is determined based on a weighted sum of the modified values of one or more nodes.

    摘要翻译: 一种方法包括接收具有第一分辨率的图像并基于该图像生成具有第二分辨率的上采样图像。 从上采样图像生成对应于多维图像空间的多维数据结构。 基于上采样图像中的一个或多个像素的值的加权和来确定数据结构的每个节点。 一个或多个像素中的每一个对应于接收到的图像中的像素,并且位于具有由该节点定义的顶点的图像空间的区域内。 滤波器修改节点的值,并且基于节点的修改值生成第二上采样图像。 基于一个或多个节点的修改值的加权和来确定不对应于接收图像中的像素的第二上采样图像的每个像素。