ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE FILM THEREFROM AND METHOD OF FORMING PATTERN
    1.
    发明申请
    ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE FILM THEREFROM AND METHOD OF FORMING PATTERN 有权
    抗紫外线或辐射敏感性树脂组合物,其抗紫外线或辐射敏感性膜及其形成图案的方法

    公开(公告)号:US20120076997A1

    公开(公告)日:2012-03-29

    申请号:US13246618

    申请日:2011-09-27

    IPC分类号: G03F7/20 B32B3/00

    摘要: Provided is an actinic-ray- or radiation-sensitive resin composition, including a resin comprising a repeating unit (A), the a repeating unit (A) containing a structural moiety (S1) that when acted on by an acid, is decomposed to thereby generate an alkali-soluble group and a structural moiety (S2) that when acted on by an alkali developer, is decomposed to thereby increase its rate of dissolution in the alkali developer, and a repeating unit (B) that when exposed to actinic rays or radiation, generates an acid.

    摘要翻译: 本发明提供一种光化学射线或辐射敏感性树脂组合物,其包含含有重复单元(A)的树脂,含有结构部分(S1)的重复单元(A),其被酸分解时分解成 从而产生碱溶性基团和结构部分(S2),当被碱显影剂作用时,其分解,从而增加其在碱性显影剂中的溶解速率,以及当暴露于光化射线时的重复单元(B) 或辐射,产生酸。

    ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN USING THE COMPOSITION
    4.
    发明申请
    ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN USING THE COMPOSITION 有权
    丙酰胺或辐射敏感性树脂组合物和使用组合物形成图案的方法

    公开(公告)号:US20110183263A1

    公开(公告)日:2011-07-28

    申请号:US13015169

    申请日:2011-01-27

    IPC分类号: G03F7/004 G03F7/20

    摘要: According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a resin (P) containing a repeating unit (A) that when exposed to actinic rays or radiation, is decomposed to thereby generate an acid and at least two types of repeating units (B1), (B2) that when acted on by an acid, are decomposed to thereby generate an alkali-soluble group, wherein the alkali-soluble group generated by the repeating unit (B1) is different from the alkali-soluble group generated by the repeating unit (B2).

    摘要翻译: 根据一个实施方案,光化射线或辐射敏感性树脂组合物包括含有重复单元(A)的树脂(P),其在暴露于光化射线或辐射时被分解,从而产生酸和至少两种类型 通过酸作用的重复单元(B1),(B2)分解,从而产生碱溶性基团,其中由重复单元(B1)产生的碱溶性基团不同于碱溶性 基团由重复单元(B2)生成。

    RESIST COMPOSITION, RESIST FILM THEREFROM AND METHOD OF FORMING NEGATIVE PATTERN USING THE COMPOSITION
    9.
    发明申请
    RESIST COMPOSITION, RESIST FILM THEREFROM AND METHOD OF FORMING NEGATIVE PATTERN USING THE COMPOSITION 审中-公开
    耐蚀组合物,其抗静电膜和使用组合物形成负面图案的方法

    公开(公告)号:US20120219758A1

    公开(公告)日:2012-08-30

    申请号:US13406213

    申请日:2012-02-27

    IPC分类号: B32B3/30 G03F7/20 G03F7/027

    摘要: Provided is a resist composition including a resin (A) containing any of repeating units (a) of general formulae (RI-a) and (RI-b) below, any of repeating units (b) of general formula (R2) below, any of repeating units (c) of general formula (R3) below and a repeating unit (d) being different from the repeating units (c) and containing a group that when acted on by an acid, is decomposed, a compound (B) that when exposed to actinic rays or radiation, is decomposed to thereby generate an acid, and any of compounds (C) of general formula (PDA-1) below.

    摘要翻译: 本发明提供一种抗蚀剂组合物,其含有下述通式(RI-a)和(RI-b)的重复单元(a),下述通式(R2)的重复单元(b) 下列通式(R 3)的重复单元(c)和重复单元(d)与重复单元(c)不同且含有被酸作用的基团分解的化合物(B) 当暴露于光化射线或辐射时,其被分解,从而产生酸,以及下述通式(PDA-1)的任何化合物(C)。

    OPTICAL COMMUNICATION APPARATUS AND OPTICAL COMMUNICATION METHOD
    10.
    发明申请
    OPTICAL COMMUNICATION APPARATUS AND OPTICAL COMMUNICATION METHOD 审中-公开
    光通信装置和光通信方法

    公开(公告)号:US20110222858A1

    公开(公告)日:2011-09-15

    申请号:US13011400

    申请日:2011-01-21

    IPC分类号: H04J14/00 H04J14/02

    CPC分类号: H04B10/548

    摘要: A present invention provides an optical communication apparatus and method which can use a data modulator and an OFDM modulator more narrow band than a transmission band.The optical communication apparatus comprise an intensity modulation means for modulating intensity of continuous light with a sine wave, a means for separating optical signal outputted by said intensity modulation means into a bottom sideband and an upper sideband and outputting, a first modulation means for modulating said upper sideband with a first electrical signal, a second modulation means for modulating said bottom sideband with a second electrical signal, and a multiplex means for multiplexing an output signal from said first modulation means and an output signal from said second modulation means and outputting.

    摘要翻译: 本发明提供一种可以使用比传输频带更窄的数据调制器和OFDM调制器的光通信装置和方法。 光通信装置包括用于以正弦波调制连续光的强度的强度调制装置,用于将由所述强度调制装置输出的光信号分离为底边带和上边带的装置,并输出第一调制装置,用于调制所述 具有第一电信号的上边带,用于用第二电信号调制所述底边带的第二调制装置,以及用于对来自所述第一调制装置的输出信号和来自所述第二调制装置的输出信号进行多路复用的多路复用装置,并输出。