Particle detection system
    1.
    发明授权
    Particle detection system 有权
    粒子检测系统

    公开(公告)号:US09076629B2

    公开(公告)日:2015-07-07

    申请号:US13939675

    申请日:2013-07-11

    Abstract: This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.

    Abstract translation: 本发明提供了利用单个检测器处理低噪声的大范围检测光束电流的设计。 通过这样的设计,检测系统可以以超过小于安培(mA)的电平产生多达1010个增益和最大信号输出。 配置聚光透镜以增加检测器的带宽,可以提高扫描速度。

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