Invention Grant
- Patent Title: Particle detection system
- Patent Title (中): 粒子检测系统
-
Application No.: US13939675Application Date: 2013-07-11
-
Publication No.: US09076629B2Publication Date: 2015-07-07
- Inventor: Yi-Xiang Wang , Joe Wang , Wei-Ming Ren
- Applicant: Hermes Microvision Inc.
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION INC.
- Current Assignee: HERMES MICROVISION INC.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28
Abstract:
This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.
Public/Granted literature
- US20130327953A1 PARTICLE DETECTION SYSTEM Public/Granted day:2013-12-12
Information query
