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公开(公告)号：US20160225391A1
公开(公告)日：2016-08-04
申请号：US14608586
申请日：2015-01-29
Applicant: Headway Technologies, Inc.
Inventor： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Kazuki Sato , Hideo Mamiya
CPC classification number: G11B5/3123 , G11B5/17 , G11B5/3906 , G11B2005/0021
Abstract: A magnetic write head has a plated coil with narrow pitch and is suitable for writing at high frequencies on magnetic media with high coercivity. The narrow pitch is obtained without such disadvantages as overplating that has adversely affected prior art attempts to produce such narrow pitches. The process that produces the magnetic write head is characterized by an RIE plasma etch using O2/N2 to etch plating trenches into a baked layer of photoresist with the ratio of gases being 5/45 sccm so that a dilute O2 concentration does not create unwanted side etching of the plating trenches. In addition, a Cu seed layer is coated with an insulating layer of Al2O3 which redeposits on the trench sidewalls to inhibit redeposition of any Cu from the seed layer and prevent outward growth of the plated Cu that would result in overplating.
Abstract translation: 磁写头具有窄间距的电镀线圈，适用于高矫顽磁性介质的高频写入。 获得窄的间距没有诸如对现有技术尝试产生这种窄间距产生不利影响的过度镀敷的缺点。 产生磁写头的过程的特征在于使用O 2 / N 2的RIE等离子体蚀刻将电镀沟槽蚀刻成光致抗蚀剂的烘烤层，其中气体比例为5/45sccm，使得稀的O 2浓度不会产生不期望的侧面 蚀刻电镀槽。 此外，Cu籽晶层涂覆有Al 2 O 3的绝缘层，其重新沉积在沟槽侧壁上以抑制任何Cu从种子层的再沉积，并防止导致过镀的镀覆Cu的向外生长。
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公开(公告)号：US09412397B1
公开(公告)日：2016-08-09
申请号：US14608586
申请日：2015-01-29
Applicant: Headway Technologies, Inc.
Inventor： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Kazuki Sato , Hideo Mamiya
CPC classification number: G11B5/3123 , G11B5/17 , G11B5/3906 , G11B2005/0021
Abstract: A magnetic write head has a plated coil with narrow pitch and is suitable for writing at high frequencies on magnetic media with high coercivity. The narrow pitch is obtained without such disadvantages as overplating that has adversely affected prior art attempts to produce such narrow pitches. The process that produces the magnetic write head is characterized by an RIE plasma etch using O2/N2 to etch plating trenches into a baked layer of photoresist with the ratio of gases being 5/45 sccm so that a dilute O2 concentration does not create unwanted side etching of the plating trenches. In addition, a Cu seed layer is coated with an insulating layer of Al2O3 which redeposits on the trench sidewalls to inhibit redeposition of any Cu from the seed layer and prevent outward growth of the plated Cu that would result in overplating.
Abstract translation: 磁写头具有窄间距的电镀线圈，适用于高矫顽磁性介质的高频写入。 获得窄的间距没有诸如对现有技术尝试产生这种窄间距产生不利影响的过度镀敷的缺点。 产生磁写头的过程的特征在于使用O 2 / N 2的RIE等离子体蚀刻将电镀沟槽蚀刻成光致抗蚀剂的烘烤层，其中气体比例为5/45sccm，使得稀的O 2浓度不会产生不期望的侧面 蚀刻电镀槽。 此外，Cu籽晶层涂覆有Al 2 O 3的绝缘层，其重新沉积在沟槽侧壁上以抑制任何Cu从种子层的再沉积，并防止导致过镀的镀覆Cu的向外生长。
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Patent Agency Ranking
3.发明授权公开(公告)号：US11056282B2
公开(公告)日：2021-07-06
申请号：US16149883
申请日：2018-10-02
Applicant: HEADWAY TECHNOLOGIES, INC. , TDK CORPORATION
Inventor： Yoshitaka Sasaki , Hiroyuki Ito , Hironori Araki , Seiichiro Tomita , Atsushi Iijima
Abstract: A capacitor includes a dielectric structure formed of a sintered dielectric, and a first electrode and a second electrode each formed of a conductor. The dielectric structure includes a wall. The first electrode and the second electrode are insulated from each other by the wall. The wall has a height which is a dimension in a first direction, and a thickness which is a dimension in a second direction orthogonal to the first direction, the height being greater than the thickness. The wall has a non-straight shape when seen in the first direction. A manufacturing method for the capacitor includes forming the dielectric structure, and forming the first electrode and the second electrode simultaneously after the formation of the dielectric structure.
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4.发明授权公开(公告)号：US10283274B2
公开(公告)日：2019-05-07
申请号：US15651582
申请日：2017-07-17
Applicant: HEADWAY TECHNOLOGIES, INC. , TDK CORPORATION
Inventor： Yoshitaka Sasaki , Hiroyuki Ito , Hironori Araki , Seiichiro Tomita , Atsushi Iijima
Abstract: A capacitor includes a dielectric structure formed of a sintered dielectric, and a first electrode and a second electrode each formed of a conductor. The dielectric structure includes a wall. The first electrode and the second electrode are insulated from each other by the wall. The wall has a height which is a dimension in a first direction, and a thickness which is a dimension in a second direction orthogonal to the first direction, the height being greater than the thickness. The wall has a non-straight shape when seen in the first direction.
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公开(公告)号：US20170011756A1
公开(公告)日：2017-01-12
申请号：US15222431
申请日：2016-07-28
Applicant: Headway Technologies, Inc.
Inventor： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Kazuki Sato , Hideo Mamiya
CPC classification number: G11B5/3123 , G11B5/17 , G11B5/3906 , G11B2005/0021
Abstract: A magnetic write head has a plated coil with narrow pitch and is suitable for writing at high frequencies on magnetic media with high coercivity. The narrow pitch is obtained without such disadvantages as overplating that has adversely affected prior art attempts to produce such narrow pitches. The process that produces the magnetic write head is characterized by an RIE plasma etch using O2/N2 to etch plating trenches into a baked layer of photoresist with the ratio of gases being 5/45 sccm so that a dilute O2 concentration does not create unwanted side etching of the plating trenches. In addition, a Cu seed layer is coated with an insulating layer of Al2O3 which redeposits on the trench sidewalls to inhibit redeposition of any Cu from the seed layer and prevent outward growth of the plated Cu that would result in overplating.
Abstract translation: 磁写头具有窄间距的电镀线圈，适用于高矫顽磁性介质的高频写入。 获得窄的间距没有诸如对现有技术尝试产生这种窄间距产生不利影响的过度镀敷的缺点。 产生磁写头的过程的特征在于使用O 2 / N 2的RIE等离子体蚀刻将电镀沟槽蚀刻成光致抗蚀剂的烘烤层，其中气体比例为5/45sccm，使得稀的O 2浓度不会产生不期望的侧面 蚀刻电镀槽。 此外，Cu籽晶层涂覆有Al 2 O 3的绝缘层，其重新沉积在沟槽侧壁上以抑制任何Cu从种子层的再沉积，并防止导致过镀的镀覆Cu的向外生长。
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公开(公告)号：US09741377B1
公开(公告)日：2017-08-22
申请号：US15051321
申请日：2016-02-23
Applicant: HEADWAY TECHNOLOGIES, INC.
Inventor： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hideo Mamiya , Seiichiro Tomita , Hironori Araki
CPC classification number: G11B5/6088 , G11B5/1272 , G11B5/314 , G11B7/1387 , G11B2005/0005 , G11B2005/001 , G11B2005/0021
Abstract: A thermally-assisted magnetic recording head includes a main pole and a plasmon generator. The plasmon generator includes a first material portion and a second material portion formed of different materials. The first material portion is located away from the medium facing surface. The second material portion includes a near-field light generating surface. The main pole has a front end face including a first end face portion and a second end face portion. The near-field light generating surface, the first end face portion and the second end face portion are arranged in this order along the direction of travel of a recording medium.
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公开(公告)号：US08947986B1
公开(公告)日：2015-02-03
申请号：US14475861
申请日：2014-09-03
Applicant: Headway Technologies, Inc.
Inventor： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Seiichiro Tomita , Yukinori Ikegawa
IPC: G11B11/00
CPC classification number: G11B5/6088 , G11B5/314 , G11B2005/0021
Abstract: A TAMR head is disclosed wherein a heat sink with a bilayer configuration surrounds the main pole. There is a planar plasmon generator (PPG) with a front peg portion and a larger back portion between a waveguide and a main pole bottom surface. The PPG generates a surface plasmon mode and heats a spot on a magnetic medium during a write process. A first heat sink layer made of Au contacts a back section of the top surface in the PPG back portion to enable efficient dissipation of heat away from the PPG. The second heat sink layer may be Ru and serves as a barrier between the main pole and first heat sink layer to prevent Au migration into magnetic material, and is thermally stable to at least 450° C. to prevent a thermal breakdown of the heat sink material in proximity to the PPG front end.
Abstract translation: 公开了一种具有双层结构的散热器围绕主极的TAMR头。 有一个平面等离子体激元发生器（PPG），在波导和主极底面之间具有前端部分和较大的后部。 PPG在写入过程中产生表面等离子体激元模式并加热磁性介质上的光斑。 由Au制成的第一散热层与PPG背部中的顶表面的背部接触，以便能够有效地散发远离PPG的热量。 第二散热层可以是Ru并且用作主极和第一散热层之间的阻挡层，以防止Au迁移到磁性材料中，并且在至少450℃下是热稳定的，以防止散热片的热击穿 靠近PPG前端的材料。
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