公开(公告)号：US08170179B2

公开(公告)日：2012-05-01

申请号：US12227230

申请日：2007-05-08

申请人： Hans M. Hertz ,  Mikael Otendal ,  Tomi Tuohimaa

发明人： Hans M. Hertz ,  Mikael Otendal ,  Tomi Tuohimaa

IPC分类号： H01J35/16 ,  H01J35/08 ,  G21G4/00 ,  G21G4/06

CPC分类号： H01J35/08 ,  G21K2207/005 ,  H01J2235/082 ,  H05G2/005

摘要： A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed.

摘要翻译： 一种用于产生x射线辐射的方法，包括以下步骤：通过在压力下通过出口开启液体物质形成目标射流，所述目标射流通过相互作用区域传播; 并且在相互作用的区域中将至少一个电子束引导到目标射流上，使得电子束与目标射流相互作用以产生x射线辐射; 其中电子束在目标射流的横向方向上的半个最大宽度为靶射流横向尺寸的约50％或更小。 还公开了一种用于执行该方法的系统。

公开(公告)号：US20090141864A1

公开(公告)日：2009-06-04

申请号：US12227230

申请日：2007-05-08

申请人： Hans M. Hertz ,  Mikael Otendal ,  Tomi Tuohimaa

发明人： Hans M. Hertz ,  Mikael Otendal ,  Tomi Tuohimaa

IPC分类号： H01J35/08

CPC分类号： H01J35/08 ,  G21K2207/005 ,  H01J2235/082 ,  H05G2/005

摘要： A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed.

摘要翻译： 一种用于产生x射线辐射的方法，包括以下步骤：通过在压力下通过出口开启液体物质形成靶射流，所述目标射流通过相互作用区域传播; 并且在相互作用的区域中将至少一个电子束引导到目标射流上，使得电子束与目标射流相互作用以产生x射线辐射; 其中电子束在目标射流的横向方向上的半个最大宽度为靶射流横向尺寸的约50％或更小。 还公开了一种用于执行该方法的系统。

公开(公告)号：US08837679B2

公开(公告)日：2014-09-16

申请号：US13262499

申请日：2009-04-03

申请人： Oscar Hemberg ,  Tomi Tuohimaa ,  Mikael Otendal

发明人： Oscar Hemberg ,  Tomi Tuohimaa ,  Mikael Otendal

IPC分类号： H01J35/10 ,  H01J35/08 ,  H01J35/12 ,  H05G2/00

CPC分类号： H01J35/08 ,  G03F7/70033 ,  H01J35/12 ,  H01J2235/082 ,  H01J2235/1204 ,  H01J2235/1279 ,  H05G2/003 ,  H05G2/008

摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.

摘要翻译： 提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。 在根据本发明的方法中，使用高压泵将液态金属的压力升高至至少10巴。 然后将加压液体金属传导到喷嘴并以空间连续射流的形式喷射到真空室中。 在通过真空室之后，将液态金属收集在收集容器中，并且将液态金属的压力升高到入口压力，例如， 使用底漆泵，适用于高压泵的入口。 本发明还涉及具有这种循环系统的相应的循环系统和X射线源。

公开(公告)号：US20120057680A1

公开(公告)日：2012-03-08

申请号：US13262499

申请日：2009-04-03

申请人： Oscar Hemberg ,  Tomi Tuohimaa ,  Mikael Otendal

发明人： Oscar Hemberg ,  Tomi Tuohimaa ,  Mikael Otendal

IPC分类号： H01J35/02

CPC分类号： H01J35/08 ,  G03F7/70033 ,  H01J35/12 ,  H01J2235/082 ,  H01J2235/1204 ,  H01J2235/1279 ,  H05G2/003 ,  H05G2/008

摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.

摘要翻译： 提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。 在根据本发明的方法中，使用高压泵将液态金属的压力升高至至少10巴。 然后将加压液体金属传导到喷嘴并以空间连续射流的形式喷射到真空室中。 在通过真空室之后，将液体金属收集在收集容器中，并且将液态金属的压力升高到入口压力，例如， 使用底漆泵，适用于高压泵的入口。 本发明还涉及具有这种循环系统的相应的循环系统和X射线源。

公开(公告)号：US09245707B2

公开(公告)日：2016-01-26

申请号：US14404836

申请日：2012-05-29

申请人： Tomi Tuohimaa ,  Oscar Hemberg

发明人： Tomi Tuohimaa ,  Oscar Hemberg

IPC分类号： H01J35/18 ,  H01J35/02 ,  H05G1/02

CPC分类号： H01J35/18 ,  H01J35/025 ,  H05G1/02

摘要： An X-ray window includes a primary and a secondary window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer. To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry which is electrically insulated from the charge-drain layer.

摘要翻译： X射线窗口包括主窗口元件和次窗口元件。 为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。 同时，源自电子照射和/或沉积带电粒子的电荷将经由电荷 - 漏极层从次级窗口元件排出。 为了防止大的碎片颗粒使次窗口元件短路，用于加热窗口元件的电流流过与电荷 - 漏极层电绝缘的加热电路。

公开(公告)号：US20150146866A1

公开(公告)日：2015-05-28

申请号：US14404836

申请日：2012-05-29

申请人： Tomi Tuohimaa ,  Oscar Hemberg

发明人： Tomi Tuohimaa ,  Oscar Hemberg

IPC分类号： H01J35/18 ,  H05G1/02

CPC分类号： H01J35/18 ,  H01J35/025 ,  H05G1/02

摘要： An X-ray window includes a primary and a secondary window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer. To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry which is electrically insulated from the charge-drain layer.

摘要翻译： X射线窗口包括主窗口元件和次窗口元件。 为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。 同时，源自电子照射和/或沉积带电粒子的电荷将经由电荷 - 漏极层从次级窗口元件排出。 为了防止大的碎片颗粒使次窗口元件短路，用于加热窗口元件的电流流过与电荷 - 漏极层电绝缘的加热电路。

公开(公告)号：US09564283B2

公开(公告)日：2017-02-07

申请号：US14408085

申请日：2012-06-14

申请人： Oscar Hemberg ,  Tomi Tuohimaa ,  Per Takman

发明人： Oscar Hemberg ,  Tomi Tuohimaa ,  Per Takman

IPC分类号： H01J29/62 ,  H01J35/04 ,  H01J35/08 ,  G21K1/08 ,  G21K5/04 ,  H01J35/14

CPC分类号： H01J29/62 ,  G21K1/08 ,  G21K5/04 ,  H01J35/04 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H01J2235/16

摘要： In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.

摘要翻译： 在电子照射系统中，气密壳体包围通过至少一个孔连通的阴极区域和照射区域。 在阴极区域中设置有用于发射电子束的高电压阴极。 在照射区域中，存在被配置为容纳待照射的静止或移动物体的照射部位。 阴极降解碎屑的迁移通过设计用于防止带正电荷的颗粒经由孔径进入阴极区域的电场而受到限制。 本发明可以用实现能量阈值的轴向电场或使带电粒子远离导入阴极区域的横向场来实现。

公开(公告)号：US09380690B2

公开(公告)日：2016-06-28

申请号：US13884447

申请日：2011-12-21

申请人： Oscar Hemberg ,  Tomi Tuohimaa ,  Björn Sundman

发明人： Oscar Hemberg ,  Tomi Tuohimaa ,  Björn Sundman

IPC分类号： H05G1/52 ,  H01J35/14 ,  H01J35/08

CPC分类号： H01J35/14 ,  H01J35/08 ,  H01J2235/082 ,  H05G1/52

摘要： A technique for indirectly measuring the degree of alignment of a beam in an electron-optical system including aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practiced in connection with an X-ray source which is operable to produce an X-ray target, further, a technique for determining and controlling a width of an electron-beam at its intersection point with the target.

摘要翻译： 一种用于间接测量包括对准装置，聚焦装置和偏转装置的电子 - 光学系统中的光束对准程度的技术。 为了进行测量，可以使用简单的传感器，即使是单元件传感器，只要它具有明确的空间范围。 当与可操作以产生X射线靶的X射线源相结合时，进一步地，用于确定和控制电子束在与目标的交点处的宽度的技术。

公开(公告)号：US09171693B2

公开(公告)日：2015-10-27

申请号：US13885759

申请日：2010-12-03

申请人： Oscar Hemberg ,  Tomi Tuohimaa

发明人： Oscar Hemberg ,  Tomi Tuohimaa

IPC分类号： H05G1/08 ,  H01J35/02 ,  H01J35/18 ,  H01J35/08 ,  H01J35/00

CPC分类号： H01J35/18 ,  H01J35/00 ,  H01J35/02 ,  H01J35/025 ,  H01J35/08 ,  H01J2235/082 ,  H01J2235/168 ,  H01J2235/183 ,  H05G1/08

摘要： An X-ray window including a primary and a secondary window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the window element. To prevent large debris particles from short-circuiting the window element and changing the desired heating pattern, the current for heating the window element flows through a layer which is insulated from the charge-drain layer.

摘要翻译： 包括主窗口元件和次窗口元件的X射线窗口。 为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。 同时，从电子照射和/或沉积带电粒子的电荷被排出窗元件。 为了防止大的碎屑颗粒使窗体元件短路并改变所需的加热模式，用于加热窗口元件的电流流过与电荷 - 漏极层绝缘的层。

公开(公告)号：US20150179388A1

公开(公告)日：2015-06-25

申请号：US14408085

申请日：2012-06-14

申请人： Oscar Hemberg ,  Tomi Tuohimaa ,  Per Takman

发明人： Oscar Hemberg ,  Tomi Tuohimaa ,  Per Takman

IPC分类号： H01J29/62 ,  G21K1/08 ,  G21K5/04 ,  H01J35/08 ,  H01J35/14

CPC分类号： H01J29/62 ,  G21K1/08 ,  G21K5/04 ,  H01J35/04 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H01J2235/16

摘要： In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.

摘要翻译： 在电子照射系统中，气密壳体包围通过至少一个孔连通的阴极区域和照射区域。 在阴极区域中设置有用于发射电子束的高电压阴极。 在照射区域中，存在被配置为容纳待照射的静止或移动物体的照射部位。 阴极降解碎屑的迁移通过设计用于防止带正电荷的颗粒经由孔径进入阴极区域的电场而受到限制。 本发明可以用实现能量阈值的轴向电场或使带电粒子远离导入阴极区域的横向场来实现。