公开(公告)号：US20200303157A1

公开(公告)日：2020-09-24

申请号：US16357796

申请日：2019-03-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kotaro HOSOYA

IPC: H01J37/20 ,  H01J37/244 ,  H01J37/22

Abstract: According to one embodiment, a holder includes a top member, a side member, and a bottom member. The top member has a hole for allowing transmission of a charged particle beam, and the sample is mountable in the hole. The bottom member is provided to overlap with the top member in a plan view. The side member is connected to a part of the top member and a part of the bottom member such that the top member and the bottom member are separated from each other in a cross-sectional view. An opening portion is a region surrounded by the top member, the side member, and the bottom member, and a scintillator is provided in the opening portion.

公开(公告)号：US20200206789A1

公开(公告)日：2020-07-02

申请号：US16616165

申请日：2017-06-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Akinari MORIKAWA ,  Kotaro HOSOYA

IPC: B08B7/00 ,  H01J37/20 ,  H01J37/26

Abstract: To provide a charged particle beam apparatus. The charged particle beam apparatus includes: a stage on which a sample is placed; a cleaner configured to remove a contaminant on the sample; and a stage control unit configured to adjust a relative positional relationship between the cleaner and the sample by moving the stage during use of the cleaner.

公开(公告)号：US20160203947A1

公开(公告)日：2016-07-14

申请号：US15023456

申请日：2014-10-07

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kenji AOKI ,  Tsutomu SAITOU ,  Kotaro HOSOYA ,  Mitsuhiro NAKAMURA ,  Kunji SHIGETO

IPC: H01J37/29 ,  H01J37/073 ,  H01J37/244

CPC classification number: H01J37/292 ,  H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24495 ,  H01J2237/248 ,  H01J2237/2809

Abstract: The objective of the present invention is to provide a charged particle beam device, wherein the positional relationship between reflected electron detection elements and a sample and the vacuum state of the sample surroundings are evaluated to select automatically a reflected electron detection element appropriate for acquiring an intended image. In this charged particle beam device, all the reflected electron detection elements are selected when the degree of vacuum inside the sample chamber is high and the sample is distant from the reflected electron detectors, while a reflected electron detection element appropriate for acquiring a compositional image or a height map image is selected when the degree of vacuum inside the sample chamber is high and the sample is close to the reflected electron detectors. When the degree of vacuum inside the sample chamber is low, all the reflected electron detection elements are selected.

Abstract translation: 本发明的目的是提供一种带电粒子束装置，其中评估反射电子检测元件与样品之间的位置关系和样品周围的真空状态，以自动选择适于获得预期的反射电子检测元件 图片。 在该带电粒子束装置中，当样品室内的真空度高且样品远离反射的电子检测器时，选择所有的反射电子检测元件，而反射的电子检测元件适于获得组成图像或 当样品室内的真空度高且样品接近反射的电子检测器时，选择高度图图像。 当样品室内的真空度低时，选择所有的反射电子检测元件。