公开(公告)号：US20160118218A1

公开(公告)日：2016-04-28

申请号：US14896753

申请日：2014-04-04

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kunji SHIGETO ,  Mitsugu SATO ,  Tsutomu SAITO ,  Kohtaro HOSOYA ,  Yoshihiro TAKAHOKO ,  Tohru ANDO

IPC: H01J37/26 ,  H01J37/28

CPC classification number: H01J37/265 ,  H01J37/09 ,  H01J37/20 ,  H01J37/28

Abstract: The present invention relates to enabling a versatile charged particle beam device, which is used for a wide range of kinds of samples to be observed and has parameters of emission conditions of a primary charged particle beam that is difficult to be registered in advance, to be operated easily and accurately even by a less-experienced operator and to obtain high-resolution images. A charged particle beam device according to the present invention includes, for example: a charged particle source, a focusing lens for a primary charged particle beam emitted from the charged particle source, an objective lens for focusing the primary charged particle beam, a movable objective aperture having multiple objective apertures disposed on a side of the charged particle source with respect to the objective lens, a detector of a secondary signal from the sample resulting from emission of the primary charged particle beam, a display unit configured to process and display a detected secondary signal, and a storage unit configured to store multiple emission conditions of the primary particle beam. The operation controller makes one emission condition be selected, determines whether or not the objective aperture is suitable for the selected emission condition, displays that the objective aperture is unsuitable when the objective aperture is unsuitable, and preadjusts the primary charged particle beam according to the selected emission condition and stores the preadjustment result as parameters for the emission conditions when the objective aperture is suitable.

Abstract translation: 本发明涉及能够实现通用的带电粒子束装置，其用于待观察的各种样品的样品，并且具有难以预先登记的初级带电粒子束的发射条件的参数为 即使经验较少的操作员也能轻松准确地操作，并获得高分辨率图像。 根据本发明的带电粒子束装置包括：带电粒子源，用于从带电粒子源发射的初级带电粒子束的聚焦透镜，用于聚焦初级带电粒子束的物镜，可移动物镜 具有设置在所述带电粒子源相对于所述物镜的一侧上的多个目标孔的孔，来自所述主要带电粒子束的发射产生的样本的次级信号的检测器，被配置为处理和显示检测到的 辅助信号和被配置为存储一次粒子束的多个发射条件的存储单元。 操作控制器选择一个发射条件，确定物镜孔径是否适合所选择的发射条件，当物镜孔径不合适时显示物镜孔径不合适，并且根据所选择的预先调整初级带电粒子束 发射条件，并将预调整结果作为目标孔径适合的发射条件的参数存储。