公开(公告)号：US20160071685A1

公开(公告)日：2016-03-10

申请号：US14782695

申请日：2014-03-05

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shinsuke KAWANISHI ,  Yusuke OMINAMI ,  Masahiko AJIMA ,  Hiroyuki SUZUKI

IPC: H01J37/16 ,  H01J37/26

CPC classification number: H01J37/16 ,  H01J37/026 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: In a SEM device which enables observations under an atmospheric pressure, in the event that a diaphragm is damaged during an observation of a sample, air flows into a charged particle optical barrel from the vicinity of the sample, due to the differential pressure between the inside of the charged particle optical barrel under vacuum and the vicinity of the sample under the atmospheric pressure. At this time, the sample may be sucked into the charged particle optical barrel. In this case, a charged particle optical system and a detector are contaminated thereby, which causes performance degradation or failures of the charged particle microscope. For coping therewith, it is necessary to prevent the charged particle optical barrel from being contaminated, without inducing a time lag, with a simple structure. In a charged particle beam device adapted to place a sample in a non-vacuum environment, there is provided a filter member which is placed on the path of a primary charged particle beam at least in a state where the primary charged particle beam is directed to the sample and, further, is adapted to transmit or pass, therethrough, the primary charged particle beam and secondary charged particles derived from the sample, while intercepting at least a portion of a scattering substance which is scattered in the event of a fracture of the diaphragm.

Abstract translation: 在能够在大气压下进行观察的SEM装置中，在样品观察期间膜片损伤的情况下，由于内部的压差，空气从样品附近流入带电粒子光学镜筒 的带电粒子光学筒在真空下和样品在大气压附近。 此时，样品可以被吸入带电粒子光学筒中。 在这种情况下，带电粒子光学系统和检测器被污染，导致带电粒子显微镜的性能下降或失效。 为了应对，需要以简单的结构防止带电粒子光学筒被污染，而不会引起时间滞后。 在适于将样品置于非真空环境中的带电粒子束装置中，设置有过滤构件，其至少在初级带电粒子束被引导到 样品，并且还适于透射或通过从样品衍生的初级带电粒子束和二次带电粒子，同时截留至少一部分在发生断裂的情况下散射的散射物质 隔膜

公开(公告)号：US20160203944A1

公开(公告)日：2016-07-14

申请号：US14912521

申请日：2014-03-10

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yusuke OMINAMI ,  Masako NISHIMURA ,  Shinsuke KAWANISHI ,  Hiroyuki SUZUKI

IPC: H01J37/28 ,  H01J37/26 ,  H01J37/18

CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/202 ,  H01J2237/28

Abstract: Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.

Abstract translation: 公开了一种带电粒子束装置，其中在带电粒子光学系统和样品之间提供能够传输带电粒子束的分隔膜，所述带电粒子束装置消除了样品与分隔膜之间的接触，即使在 样品具有凹凸。 基于检测信号或基于检测信号生成的图像，监测样品和分隔膜之间的距离，所述检测信号从检测器输出，该检测器检测由于照射而从样品排出的二次带电粒子 的初级带电粒子束。