公开(公告)号：US11749493B2

公开(公告)日：2023-09-05

申请号：US17027291

申请日：2020-09-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yoshihiro Koyama ,  Tatsuya Asahata ,  Masahiro Kiyohara ,  Tsunghan Yang

IPC: H01J37/08 ,  H01J37/09

CPC classification number: H01J37/08 ,  H01J37/09 ,  H01J2237/0805 ,  H01J2237/31749

Abstract: A liquid metal ion source (50) includes: a reservoir (10) configured to hold an ion material (M) forming a liquid metal; a needle electrode (20); an extraction electrode (22) configured to cause an ion of the ion material to be emitted from a distal end of the needle electrode; a beam diaphragm (24), which is arranged on a downstream side of the extraction electrode, and is configured to limit a beam diameter of the ion; and a vacuum chamber (30) configured to accommodate and hold the reservoir, the needle electrode, the extraction electrode, and the beam diaphragm in vacuum, wherein the liquid metal ion source further includes an oxidizing gas introducing portion (40), and wherein the oxidizing gas introducing portion communicates to the vacuum chamber, and is configured to introduce an oxidizing gas into a periphery of the needle electrode.