公开(公告)号：US11774651B2

公开(公告)日：2023-10-03

申请号：US17116189

申请日：2020-12-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shohei Hayashi ,  Tetsushi Shimomura ,  Hiroyasu Fujiwara

IPC: G02B5/18 ,  G02F1/39 ,  G02B27/00 ,  G02B3/08

CPC classification number: G02B5/1871 ,  G02B5/1809 ,  G02B5/1857 ,  G02B5/1876 ,  G02B27/0025 ,  G02F1/39 ,  G02B3/08 ,  G02F2203/13

Abstract: A terahertz wave lens includes a substrate having a surface provided with an uneven structure that changes a phase of the terahertz wave. The uneven structure includes a plurality of holes that are periodically arranged. The uneven structure includes a plurality of regions where the plurality of holes are arranged. A height of the hole in a thickness direction of the substrate and a width of the pillar differ for each of the regions. Outer end portions of the uneven structure in the thickness direction are located on the same plane.

公开(公告)号：US10784393B2

公开(公告)日：2020-09-22

申请号：US16100457

申请日：2018-08-10

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroyasu Fujiwara ,  Wei Dong ,  Kazutoshi Nakajima ,  Shohei Hayashi

IPC: H01L31/08 ,  H01L31/02 ,  H01L31/0352 ,  H01L31/07 ,  H01L31/10 ,  H01L31/108 ,  H01L31/101 ,  H01L31/0232 ,  H01L31/0224

Abstract: A photodetection element is a photodetection element having an incidence surface for light on a back surface of a semiconductor layer, and includes a periodic nano-concave/convex structure provided on a front surface of the semiconductor layer and having convex portions and concave portions constituting a longitudinal resonator and a transverse resonator for the light incident from the incidence surface, the periodic nano-concave/convex structure converting the light into surface plasmons, and a metal film provided to cover the periodic nano-concave/convex structure, a height and an arrangement pitch of the convex portions in the periodic nano-concave/convex structure are set such that a resonance wavelength of the longitudinal resonator and a resonance wavelength of the transverse resonator match, and a thickness of the metal film is equal to or greater than 20 nm.

公开(公告)号：US12135444B2

公开(公告)日：2024-11-05

申请号：US18209718

申请日：2023-06-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shohei Hayashi ,  Tetsushi Shimomura ,  Hiroyasu Fujiwara

IPC: G02B5/18 ,  G02B27/00 ,  G02F1/39 ,  G02B3/08

Abstract: A terahertz wave lens includes a substrate having a surface provided with an uneven structure that changes a phase of the terahertz wave. The uneven structure includes a plurality of holes that are periodically arranged. The uneven structure includes a plurality of regions where the plurality of holes are arranged. A height of the hole in a thickness direction of the substrate and a width of the pillar differ for each of the regions. Outer end portions of the uneven structure in the thickness direction are located on the same plane.

公开(公告)号：US12032184B2

公开(公告)日：2024-07-09

申请号：US17120885

申请日：2020-12-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shohei Hayashi ,  Tetsushi Shimomura ,  Hiroyasu Fujiwara

IPC: G02B5/18 ,  C23F4/00 ,  G02B3/00 ,  G02B3/08 ,  H01Q15/02 ,  H01Q15/04

CPC classification number: G02B5/1866 ,  C23F4/00 ,  G02B5/1809 ,  G02B5/1857 ,  G02B5/1871 ,  G02B5/1876 ,  G02B2003/0093 ,  G02B3/08 ,  H01Q15/02 ,  H01Q15/04

Abstract: A terahertz wave lens concentrates or collimates a terahertz wave. The terahertz wave lens includes a substrate having a surface provided with an uneven structure that changes a phase of the terahertz wave. The uneven structure includes a plurality of pillars that are periodically arranged. The uneven structure includes a plurality of regions where the plurality of pillars are arranged. A height of the pillar in a thickness direction of the substrate and a width of the pillar differ for each of the regions. A distance (period) between centers of the pillars adjacent to each other is constant. Outer end portions of the uneven structure in the thickness direction are located on the same plane.