公开(公告)号：US20220367783A1

公开(公告)日：2022-11-17

申请号：US17736161

申请日：2022-05-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki SUZUKI ,  Takuma OSAKI ,  Makoto NOZAKI ,  Kota SUGIZAKI

IPC: H01L41/047 ,  H01L41/04 ,  H01L41/09 ,  G02B26/08

Abstract: A metal substrate supported by a wiring substrate includes a movable portion, a first extending portion, a first coupling portion that couples the first extending portion and the movable portion, and a first connection portion connected to the first extending portion. The first connection portion includes a first fixing region fixed to the wiring substrate, and a first connection region connected to the first extending portion and to the first fixing region. The first connection region includes a first bent portion. The first bent portion has a first outer edge on a movable portion side, and a second outer edge opposite the movable portion, and each of the first outer edge and the second outer edge is bent toward the movable portion side when viewed in a Z-axis direction.

公开(公告)号：US20220365337A1

公开(公告)日：2022-11-17

申请号：US17736146

申请日：2022-05-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki SUZUKI ,  Takuma OSAKI ,  Makoto NOZAKI ,  Kota SUGIZAKI

IPC: G02B26/08 ,  H01L41/09

Abstract: A piezoelectric drive element disposed on a placement surface of a metal substrate includes a piezoelectric drive body having a first main surface opposite the placement surface, a second main surface on a placement surface side, and a side surface, and a first electrode disposed on the first main surface. The piezoelectric drive element is disposed on the placement surface such that a part of the placement surface is located outside the side surface. A second bonding member having conductivity includes a first portion disposed between the placement surface and the piezoelectric drive element, and a second portion being continuous from the first portion and disposed in a corner formed by the part of the placement surface and the side surface. The second portion does not reach the first electrode.

公开(公告)号：US20250052611A1

公开(公告)日：2025-02-13

申请号：US18717560

申请日：2022-10-27

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Makoto NOZAKI ,  Naoto SAKURAI ,  Norihiro IWASAKI

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28

Abstract: A spectroscopic device includes a swing element having a swing surface, a diffraction grating configured to disperse measurement light reflected by the swing surface, a first light detection unit including a first light detector that detects a part of the measurement light dispersed by the diffraction grating, a light source configured to emit inspection light, and a second light detection unit including a second light detector configured to detect the inspection light reflected by the swing surface. The swing element includes a support portion, a movable portion having the swing surface, and a coupling portion coupling the support portion and the movable portion such that a swing angle of the swing surface changes with a predetermined axis as a center line. The second light detection unit has an elongated light receiving region in which a moving direction of the inspection light is a longitudinal direction.

公开(公告)号：US20220367782A1

公开(公告)日：2022-11-17

申请号：US17736136

申请日：2022-05-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki SUZUKI ,  Takuma OSAKI ,  Makoto NOZAKI ,  Kota SUGIZAKI

IPC: H01L41/047 ,  H01L41/04 ,  G02B26/08 ,  H01L41/09

Abstract: A metal substrate supported by a wiring substrate includes a first extending portion and a first connection portion connected to the first extending portion. The first connection portion includes a first region facing a portion of a wiring substrate in a Z-axis direction, a second region being continuous from the first region, and a third region being continuous from the second region. When viewed in the Z-axis direction, in a direction perpendicular to a connection direction in which the third region is connected to the second region, a width of the second region is larger than a width of the third region. A first bonding member bonding the wiring substrate and the metal substrate includes a first portion disposed between the portion and the first region, and a second portion being continuous from the first portion. The second portion reaches the second region but does not reach the third region.

公开(公告)号：US20220367786A1

公开(公告)日：2022-11-17

申请号：US17736178

申请日：2022-05-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki SUZUKI ,  Takuma OSAKI ,  Makoto NOZAKI ,  Kota SUGIZAKI

IPC: H01L41/09 ,  H01L41/047 ,  H01L41/053

Abstract: An actuator device includes a wiring substrate; a metal substrate; a first electrode unit provided to the metal substrate; a piezoelectric drive body disposed on the first electrode unit; a second electrode unit disposed on a first main surface of the piezoelectric drive body; a piezoelectric detection body disposed on the second electrode unit; a third electrode unit disposed on a third main surface of the piezoelectric detection body; a connection unit; an input unit; and an output unit. The connection unit is configured to be electrically connected to a reference potential on an outside such that a potential of the second electrode unit becomes the reference potential. The input unit is configured to input a drive signal to the first electrode unit from the outside. The output unit is configured to output an output signal generated in the piezoelectric detection body, to the outside from the third electrode unit.

公开(公告)号：US20210157127A1

公开(公告)日：2021-05-27

申请号：US16692011

申请日：2019-11-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoto SAKURAI ,  Makoto NOZAKI

IPC: G02B26/08 ,  G02B26/10

Abstract: A scanning device includes an MEMS mirror mechanism that swings a mirror with respect to a first axial line as a central line and swings the mirror with respect to a second axial line as a central line, and a control unit that generates a first drive signal for swinging the mirror with respect to the first axial line as a central line and a second drive signal for swinging the mirror with respect to the second axial line as a central line. In a lighting-on period in which a light source emits laser light in one swing of the mirror with respect to the second axial line as a central line, the control unit generates the first drive signal and the second drive signal by repeating a process of generating N pieces (N is an integer of two or greater) of second signal elements which respectively constitute the second drive signal with respect to a first signal element in a ½ cycle period in the first drive signal.