公开(公告)号：US20250052611A1

公开(公告)日：2025-02-13

申请号：US18717560

申请日：2022-10-27

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Makoto NOZAKI ,  Naoto SAKURAI ,  Norihiro IWASAKI

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28

Abstract: A spectroscopic device includes a swing element having a swing surface, a diffraction grating configured to disperse measurement light reflected by the swing surface, a first light detection unit including a first light detector that detects a part of the measurement light dispersed by the diffraction grating, a light source configured to emit inspection light, and a second light detection unit including a second light detector configured to detect the inspection light reflected by the swing surface. The swing element includes a support portion, a movable portion having the swing surface, and a coupling portion coupling the support portion and the movable portion such that a swing angle of the swing surface changes with a predetermined axis as a center line. The second light detection unit has an elongated light receiving region in which a moving direction of the inspection light is a longitudinal direction.