公开(公告)号：US20130081944A1

公开(公告)日：2013-04-04

申请号：US13628093

申请日：2012-09-27

Applicant: H.C. Starck, Inc.

Inventor： Francois-Charles Dary ,  Mark Gaydos ,  William Loewenthal ,  Steven Alfred Miller ,  Gary Rozak ,  Scott Jeffrey Volchko ,  Stefan Zimmermann ,  Michael Thomas Stawony

IPC: C23C14/34

CPC classification number: H01J37/3429 ,  B05D1/02 ,  B23K31/02 ,  C23C14/3407 ,  C23C14/3414 ,  C23C24/04 ,  H01J37/3417 ,  H01J37/3426 ,  H01J2237/081 ,  H01J2237/332 ,  Y10T156/10

Abstract: In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

Abstract translation: 在各种实施例中，至少部分地通过溅射材料的喷涂和/或焊接形成连接的溅射靶。