公开(公告)号：US20250072024A1

公开(公告)日：2025-02-27

申请号：US18237195

申请日：2023-08-23

Applicant: GlobalFoundries U.S. Inc.

Inventor： Alvin J. Joseph ,  Mark D. Levy ,  Rajendran Krishnasamy ,  Johnatan A. Kantarovsky ,  Ajay Raman ,  Ian A. McCallum-Cook

IPC: H01L29/66 ,  H01L29/20 ,  H01L29/45 ,  H01L29/778

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with a thermal plug and methods of manufacture. The structure includes: a semiconductor substrate; a gate structure over the semiconductor substrate; a source region on a first side of the gate structure; a drain region on a second side of the gate structure; and a thermal plug extending from a top side of the semiconductor substrate into an active region of the semiconductor substrate.