公开(公告)号：US10151640B2

公开(公告)日：2018-12-11

申请号：US15800329

申请日：2017-11-01

Applicant: Gigaphoton Inc.

Inventor： Masato Moriya ,  Osamu Wakabayashi ,  Yoshinobu Watabe

IPC: G01J11/00 ,  H01S3/134 ,  G02B27/14 ,  G02B5/30 ,  G01J4/04 ,  H01S3/00 ,  G01J1/04 ,  G01J1/42 ,  H01S3/23

Abstract: A light beam measurement device includes: a polarization measurement unit including a first measurement beam splitter provided on an optical path of a laser beam and configured to measure a polarization state of the laser beam having been partially reflected by the first measurement beam splitter; a beam profile measurement unit including a second measurement beam splitter provided on the optical path of the laser beam and configured to measure a beam profile of the laser beam having been partially reflected by the second measurement beam splitter; and a laser beam-directional stability measurement unit configured to measure a stability in a traveling direction of the laser beam, while the first measurement beam splitter and the second measurement beam splitter are made of a material containing CaF2.

公开(公告)号：US11081853B2

公开(公告)日：2021-08-03

申请号：US16865537

申请日：2020-05-04

Applicant: Gigaphoton Inc.

Inventor： Yoshinobu Watabe ,  Masahide Kato ,  Hiroshi Furusato

IPC: H01S3/106 ,  G03F7/20 ,  G02B7/02 ,  G02B27/09 ,  H01S3/038

Abstract: An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.

公开(公告)号：US09835495B2

公开(公告)日：2017-12-05

申请号：US14947335

申请日：2015-11-20

Applicant: Gigaphoton Inc.

Inventor： Masato Moriya ,  Osamu Wakabayashi ,  Yoshinobu Watabe

IPC: G01J11/00 ,  H01S3/134 ,  H01S3/00 ,  G01J1/42 ,  G01J1/04 ,  G01J4/04 ,  G02B5/30 ,  G02B27/14 ,  H01S3/23

CPC classification number: G01J11/00 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0477 ,  G01J1/4257 ,  G01J4/04 ,  G01J2001/4261 ,  G02B5/3066 ,  G02B27/148 ,  H01S3/0014 ,  H01S3/134 ,  H01S3/2366

Abstract: A light beam measurement device includes: a polarization measurement unit including a first measurement beam splitter provided on an optical path of a laser beam and configured to measure a polarization state of the laser beam having been partially reflected by the first measurement beam splitter; a beam profile measurement unit including a second measurement beam splitter provided on the optical path of the laser beam and configured to measure a beam profile of the laser beam having been partially reflected by the second measurement beam splitter; and a laser beam-directional stability measurement unit configured to measure a stability in a traveling direction of the laser beam, while the first measurement beam splitter and the second measurement beam splitter are made of a material containing CaF2.