公开(公告)号：US10050408B2

公开(公告)日：2018-08-14

申请号：US15379192

申请日：2016-12-14

Applicant: Gigaphoton Inc.

Inventor： Akiyoshi Suzuki ,  Osamu Wakabayashi ,  Masaki Arakawa ,  Koji Ashikawa ,  Yasuhiro Kamba

IPC: H01S3/23 ,  H01S3/081 ,  H01S3/00 ,  G02B27/12 ,  G02B27/10 ,  H01L21/67 ,  H01L21/02 ,  H01L27/12 ,  B23K26/00

Abstract: A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.

公开(公告)号：US09966721B2

公开(公告)日：2018-05-08

申请号：US15350284

申请日：2016-11-14

Applicant: Gigaphoton Inc.

Inventor： Kouji Kakizaki ,  Masaki Arakawa ,  Kouji Ashikawa ,  Yasuhiro Kamba ,  Akiyoshi Suzuki ,  Osamu Wakabayashi

IPC: H01S3/10 ,  H01S3/00 ,  H01S3/105 ,  H01S3/23 ,  H01S3/081 ,  H01S3/225 ,  H01S3/13 ,  G02B27/12 ,  G02B27/09

CPC classification number: H01S3/005 ,  G02B27/0955 ,  G02B27/123 ,  H01S3/0071 ,  H01S3/081 ,  H01S3/105 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2253 ,  H01S3/2255 ,  H01S3/2256 ,  H01S3/2366

Abstract: The laser system may include first and second laser apparatuses and a beam delivery device. The first laser apparatus may be provided so as to emit a first laser beam to the beam delivery device in a first direction. The second laser apparatus may be provided so as to emit a second laser beam to the beam delivery device in a direction substantially parallel to the first direction. The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction.