公开(公告)号：US10050408B2

公开(公告)日：2018-08-14

申请号：US15379192

申请日：2016-12-14

Applicant: Gigaphoton Inc.

Inventor： Akiyoshi Suzuki ,  Osamu Wakabayashi ,  Masaki Arakawa ,  Koji Ashikawa ,  Yasuhiro Kamba

IPC: H01S3/23 ,  H01S3/081 ,  H01S3/00 ,  G02B27/12 ,  G02B27/10 ,  H01L21/67 ,  H01L21/02 ,  H01L27/12 ,  B23K26/00

Abstract: A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.