公开(公告)号：US20190239330A1

公开(公告)日：2019-08-01

申请号：US16379511

申请日：2019-04-09

Applicant: Gigaphoton Inc.

Inventor： Motoki NIWANO

IPC: H05G2/00 ,  H01S3/23 ,  H01S3/097 ,  H01S3/115

CPC classification number: H05G2/008 ,  H01S3/09702 ,  H01S3/10 ,  H01S3/115 ,  H01S3/2232 ,  H01S3/2308

Abstract: A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).

公开(公告)号：US20240413600A1

公开(公告)日：2024-12-12

申请号：US18807533

申请日：2024-08-16

Applicant: Gigaphoton Inc.

Inventor： Shigeto KISHIMOTO ,  Hirotaka MIYAMOTO ,  Motoki NIWANO

IPC: H01S3/106 ,  G03F7/00 ,  H01S3/08 ,  H01S3/225

Abstract: A line narrowing laser device includes an optical element and a diffractive optical element positioned on an optical path of an optical resonator, a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element, a wavelength driver configured to drive the wavelength actuator, a processor configured to output a wavelength control signal to the wavelength driver so that a wavelength of pulse laser light output from the optical resonator periodically changes, and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator.

公开(公告)号：US20190235287A1

公开(公告)日：2019-08-01

申请号：US16377412

申请日：2019-04-08

Applicant: Gigaphoton Inc.

Inventor： Motoki NIWANO

IPC: G02F1/03 ,  H05G2/00

Abstract: A laser device includes: a plurality of optical shutters (61, 62); a power source device (303n) configured to generate high voltage to be applied to the optical shutters (61, 62); a high-voltage side wire (63h) connecting the power source device (303n) and each of the optical shutters (61, 62); a ground-side wire (63g) grounding each of the optical shutters (61, 62); and a high-voltage side shared wire (64h) and a ground-side shared wire (64g) connecting the optical shutters (61, 62) in parallel. One of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (61) disposed on the most upstream side in the traveling direction of the laser beam, and the other of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (62) disposed on the most downstream side in the traveling direction of the laser beam.

公开(公告)号：US20160087389A1

公开(公告)日：2016-03-24

申请号：US14960579

申请日：2015-12-07

Applicant: GIGAPHOTON INC.

Inventor： Motoki NIWANO ,  Takashi SAITO

IPC: H01S3/00 ,  G02F1/03 ,  H01S3/13 ,  H01S3/23 ,  H05G2/00 ,  H01S3/10

CPC classification number: H01S3/0085 ,  G02F1/03 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/10015 ,  H01S3/1301 ,  H01S3/2316 ,  H05G2/003 ,  H05G2/008

Abstract: A laser system capable of appropriately controlling the energy of a laser beam pulse is provided. An exemplary laser system of the present disclosure may control an optical isolator to switch from a closed state to an open state and then to return to the closed state for each of the laser beam pulses repeatedly outputted from a master oscillator. The laser system may control the optical attenuator to set an optical transmittance of the optical attenuator for each of the laser beam pulses repeatedly outputted from the master oscillator.

Abstract translation: 提供能够适当地控制激光束脉冲的能量的激光系统。 本公开的示例性激光系统可以控制光隔离器从关闭状态切换到打开状态，然后对于从主振荡器重复输出的每个激光束脉冲返回关闭状态。 激光系统可以控制光衰减器以对从主振荡器重复输出的每个激光束脉冲设置光衰减器的光透射率。