公开(公告)号：US20250096515A1

公开(公告)日：2025-03-20

申请号：US18968755

申请日：2024-12-04

Applicant: Gigaphoton Inc.

Inventor： Kazuki NAGAI ,  Yoichi SASAKI ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  H01S3/034 ,  H01S3/225

Abstract: A chamber for a gas laser device includes first and second main electrodes arranged with a longitudinal direction being along a predetermined direction as being spaced apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber, and a first preionization electrode arranged beside one side of the first main electrode. The first preionization electrode includes a first dielectric pipe extending along the longitudinal direction, a first preionization inner electrode arranged in the first dielectric pipe and extending along the longitudinal direction, and a first preionization outer electrode extending along the longitudinal direction, including a first end portion facing an outer circumference surface of the first dielectric pipe, and extending from the first end portion in a direction away from the first dielectric pipe. In a plane perpendicular to the longitudinal direction, a first corona discharge angle is an acute angle.

公开(公告)号：US20240339797A1

公开(公告)日：2024-10-10

申请号：US18746278

申请日：2024-06-18

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Hiroshi UMEDA ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  G03F7/00

CPC classification number: H01S3/038 ,  G03F7/70025

Abstract: A gas laser device includes a laser chamber including an opening, an electrical insulating portion blocking the opening, a first electrode, and a second electrode facing the first electrode. The first electrode includes a contact region contacting the surface of the electrical insulating portion, an opposing surface facing the second electrode, and a first curved surface included in a region between the contact region and the opposing surface and convexly curved toward an outer side of the first electrode. In a cross section of the first electrode along a surface extending in a separation direction of the first electrode and the second electrode, the contact region is located on an inner side of the first electrode with respect to the first curved surface, and the first curved surface is a part of a circumference of a circle or an ellipse which does not intersect the electrical insulating portion.

公开(公告)号：US20230387642A1

公开(公告)日：2023-11-30

申请号：US18447510

申请日：2023-08-10

Applicant: Gigaphoton Inc.

Inventor： Junichi FUJIMOTO ,  Rei TAKENAKA ,  Masanori TERAMOTO ,  Jeffrey P. SERCEL

IPC: H01S3/036 ,  G03F7/00

CPC classification number: H01S3/036 ,  G03F7/70025 ,  G03F7/70891 ,  H01S3/038

Abstract: A chamber device includes a housing into which a laser gas is filled, a pair of discharge electrodes generating light from the laser gas when a voltage is applied thereto, a window arranged at a wall surface of the housing and transmitting the light therethrough, a first fan causing the laser gas to flow between the discharge electrodes, a filter, a second fan rotating together with the first fan by a drive force of a drive source of the first fan, a fan-side flow path causing the laser gas filtered by the filter to flow by the second fan and a part of the laser gas to flow in a direction away from the window, and a window-side flow path communicating with the fan-side flow path and causing the laser gas flowing from the fan-side flow path by the second fan to flow toward the window.

公开(公告)号：US20240405496A1

公开(公告)日：2024-12-05

申请号：US18799414

申请日：2024-08-09

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Junichi FUJIMOTO ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  G03F7/20

Abstract: A chamber for a gas laser device includes a first main electrode and a second main electrode arranged along a predetermined direction as being apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber and transmitting light from the internal space, and a first preionization electrode arranged beside one side of the first main electrode. Here, the first preionization electrode includes a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along the first dielectric pipe, and a first preionization outer electrode extending along the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe. At least a part of the first gap is larger than 0 mm and equal to or smaller than 0.9 mm.

公开(公告)号：US20230387641A1

公开(公告)日：2023-11-30

申请号：US18447514

申请日：2023-08-10

Applicant: Gigaphoton Inc.

Inventor： Junichi FUJIMOTO ,  Takahiro TATSUMI ,  Kazuki NAGAI ,  Jeffrey P. SERCEL

IPC: H01S3/03 ,  H01S3/041 ,  H01S3/04 ,  G03F7/00

CPC classification number: H01S3/03 ,  H01S3/041 ,  H01S3/0405 ,  H01S3/0407 ,  G03F7/70025 ,  G03F7/70891

Abstract: A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.