公开(公告)号：US20230387642A1

公开(公告)日：2023-11-30

申请号：US18447510

申请日：2023-08-10

Applicant: Gigaphoton Inc.

Inventor： Junichi FUJIMOTO ,  Rei TAKENAKA ,  Masanori TERAMOTO ,  Jeffrey P. SERCEL

IPC: H01S3/036 ,  G03F7/00

CPC classification number: H01S3/036 ,  G03F7/70025 ,  G03F7/70891 ,  H01S3/038

Abstract: A chamber device includes a housing into which a laser gas is filled, a pair of discharge electrodes generating light from the laser gas when a voltage is applied thereto, a window arranged at a wall surface of the housing and transmitting the light therethrough, a first fan causing the laser gas to flow between the discharge electrodes, a filter, a second fan rotating together with the first fan by a drive force of a drive source of the first fan, a fan-side flow path causing the laser gas filtered by the filter to flow by the second fan and a part of the laser gas to flow in a direction away from the window, and a window-side flow path communicating with the fan-side flow path and causing the laser gas flowing from the fan-side flow path by the second fan to flow toward the window.