公开(公告)号：US09966721B2

公开(公告)日：2018-05-08

申请号：US15350284

申请日：2016-11-14

Applicant: Gigaphoton Inc.

Inventor： Kouji Kakizaki ,  Masaki Arakawa ,  Kouji Ashikawa ,  Yasuhiro Kamba ,  Akiyoshi Suzuki ,  Osamu Wakabayashi

IPC: H01S3/10 ,  H01S3/00 ,  H01S3/105 ,  H01S3/23 ,  H01S3/081 ,  H01S3/225 ,  H01S3/13 ,  G02B27/12 ,  G02B27/09

CPC classification number: H01S3/005 ,  G02B27/0955 ,  G02B27/123 ,  H01S3/0071 ,  H01S3/081 ,  H01S3/105 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2253 ,  H01S3/2255 ,  H01S3/2256 ,  H01S3/2366

Abstract: The laser system may include first and second laser apparatuses and a beam delivery device. The first laser apparatus may be provided so as to emit a first laser beam to the beam delivery device in a first direction. The second laser apparatus may be provided so as to emit a second laser beam to the beam delivery device in a direction substantially parallel to the first direction. The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction.

公开(公告)号：US09198273B2

公开(公告)日：2015-11-24

申请号：US14339172

申请日：2014-07-23

Applicant: GIGAPHOTON INC.

Inventor： Miwa Igarashi ,  Yukio Watanabe ,  Kouji Ashikawa ,  Norio Iwai ,  Osamu Wakabayashi

IPC: G21K5/04 ,  H05G2/00 ,  G21K5/10

CPC classification number: H05G2/008 ,  G21K5/10 ,  H05G2/003

Abstract: An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.

Abstract translation: 用于产生极紫外光的装置可以包括参考构件，固定到参考构件的腔室，所述腔室包括至少一个窗口，激光束引入光学系统，其配置成通过至少一个外部供应的激光束 一个窗口，以及配置成将激光束引入光学系统定位到参考构件的定位机构。