公开(公告)号：US11007778B2

公开(公告)日：2021-05-18

申请号：US16537533

申请日：2019-08-10

Applicant: Gigaphoton Inc.

Inventor： Katsuhiko Wakana

IPC: H05G2/00 ,  B41J2/125

Abstract: A droplet discharge apparatus may include a droplet discharge unit configured to discharge droplets of a target substance stored in a tank at intervals through an opening of a nozzle connected to the tank, a speed sensor configured to measure the speed of a droplet discharged from the droplet discharge unit, and a calculation unit configured to calculate the volume of the target substance consumed per unit time, based on cross-sectional area of the opening of the nozzle and the speed of the droplet.

公开(公告)号：US11036150B2

公开(公告)日：2021-06-15

申请号：US16731561

申请日：2019-12-31

Applicant: Gigaphoton Inc.

Inventor： Katsuhiko Wakana

IPC: G03F7/20 ,  H05G2/00

Abstract: An extreme ultraviolet light generation apparatus includes: an optical base; and a chamber module replaceable from the optical base. The chamber module includes a chamber in which extreme ultraviolet light is generated, a condenser mirror disposed inside the chamber and configured to condense extreme ultraviolet light generated inside the chamber, a window configured to transmit, into the chamber, a laser beam introduced into the optical base, and having a function to seal up the chamber, and a laser beam condensation optical system configured to condense the laser beam having transmitted through the window.

公开(公告)号：US10925143B2

公开(公告)日：2021-02-16

申请号：US16674793

申请日：2019-11-05

Applicant: Gigaphoton Inc.

Inventor： Katsuhiko Wakana

IPC: H05G2/00 ,  G02B26/08

Abstract: A laser apparatus includes an optical element disposed on a laser beam axis, an actuator configured to displace the optical element to displace the laser beam axis, a driving amount monitor configured to monitor a driving amount of the actuator, an optical axis monitor disposed along the laser beam axis and configured to monitor the laser beam axis, and a control unit configured to control the actuator based on a monitoring result of the optical axis monitor and determine abnormality of the optical element based on a monitoring result of the driving amount monitor.

公开(公告)号：US09229192B2

公开(公告)日：2016-01-05

申请号：US14697260

申请日：2015-04-27

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi Someya ,  Yukio Watanabe ,  Katsuhiko Wakana ,  Osamu Wakabayashi

IPC: G02B7/182 ,  G02B7/18 ,  G02B5/08 ,  G02B5/10

CPC classification number: G02B7/181 ,  G02B5/0891 ,  G02B5/10 ,  G03F7/70033 ,  G03F7/70175

Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.