摘要:
A method of manufacturing a surface acoustic device that has a surface acoustic wave filter including comb-like electrodes, electrode pads, and wiring patterns formed on a joined substrate produced by joining a piezoelectric substrate and a supporting substrate to each other. This method includes the steps of: activating at least one of the joining surfaces of the piezoelectric substrate and the supporting substrate; and joining the piezoelectric substrate and the supporting substrate in such a manner that the activated joining surfaces face each other.
摘要:
A surface acoustic wave device includes multiple SAW resonators formed on a piezoelectric substrate and connected in a ladder arrangement, the piezoelectric substrate having a polarization inverted region on which either a series-arm resonator or a parallel-arm resonator is formed.
摘要:
A surface acoustic wave resonator includes a piezoelectric substrate, and a SAW resonator having an interdigital transducer. The interdigital transducer satisfies 0.15LnullWnull0.45L where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the said interdigital transducer in a direction of SAW propagation.
摘要翻译:声表面波谐振器包括压电基片和具有叉指式换能器的SAW谐振器。 叉指换能器满足0.15L <= W <= 0.45L,其中W是形成叉指换能器的所有电极指的总宽度,L是所述叉指换能器在SAW传播方向上的长度。
摘要:
A duplexer includes a ladder filter and a multimode filter that are formed on the same surface of a predetermined substrate. In this duplexer, a first comb-like electrode of the ladder filter and a second comb-like electrode of the multimode filter have the same layer structure with the same film thickness. The first comb-like electrode and the second comb-like electrode are formed with single-layer films mainly containing aluminum. The relationship among the film thickness h of the first comb-like electrode and the second comb-like electrode, the center frequency f1 of the frequency band of the ladder filter, and the center frequency f2 of the frequency band of the multimode filter, is expressed as:300nullhnullf1null480300nullhnullf2null430.
摘要:
A duplexer includes two surface acoustic wave filters that are formed on one substrate, at least one of the two surface acoustic wave filters being a ladder filter. In this duplexer, the positional difference between the centers in the surface acoustic wave propagating direction of each two neighboring comb-like electrodes among comb-like electrodes that form series-arm resonators in the ladder filter is equal to or smaller than a fourth of the length in the propagating direction of the comb-like electrode having the larger number of pairs of electrode fingers of each two neighboring comb-like electrodes.
摘要:
A multi-mode surface acoustic wave filter device includes: a piezoelectric substrate; at least one input IDT (interdigital transducer) and at least one output IDT that are formed on the piezoelectric substrate; reflectors that are formed on the piezoelectric substrate and arranged on the external sides of the input IDT and the output IDT; an input terminal that supplies input signals to the input IDT; and an output terminal that receives output signals from the output IDT. In this multi-mode surface acoustic wave filter, the input terminal and the output terminal extend in the same direction.
摘要:
A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.
摘要:
Efficient transverse energy confinement, and provision of a surface acoustic wave filter having preferable characteristics of both insertion loss and shape factor are obtained. In the surface acoustic wave filter, electrode fingers of one comb electrode are laid in a state of being inserted to the electrode fingers of the other comb electrode, and a thick film thicker than each plurality of electrode fingers is produced in a partial area of the bus bar, and a tip gap is provided between the top of each plurality of electrode fingers and the end face of the opposed bus bar, with a distance therebetween set not greater than 0.2null (where, null is one period of the comb electrode).
摘要:
A surface acoustic wave element includes: metal patterns that include interdigital transducers, each of the metal patterns being formed with a first alloy or multi-layer film of metals having different standard electrode potentials; and metal films each formed with a second alloy or multi-layer film containing metals having different standard electrode potentials from the standard electrode potentials of the metals forming the first alloy or multi-layer film, the metal films being formed at least on a part of the regions other than the regions corresponding to the electrode fingers of the interdigital transducers of all the metal patterns that are electrically independent of one another.
摘要:
A surface acoustic wave filter includes: an input interdigital transducer and an output interdigital transducer that are formed on a piezoelectric substrate; a capacitance that is provided between the input terminal of the input interdigital transducer and the output terminal of the output interdigital transducer; a first common ground terminal that connects the ground terminal of the input interdigital transducer and the ground terminal of the output interdigital transducer; and an inductance that is provided between the first common ground terminal and a ground.