公开(公告)号：US20040189146A1

公开(公告)日：2004-09-30

申请号：US10809867

申请日：2004-03-26

申请人： FUJITSU MEDIA DEVICES LIMITED ,  FUJITSU LIMITED

发明人： Masanori Ueda ,  Osamu Kawachi ,  Michio Miura ,  Suguru Warashina

IPC分类号： H02N002/00 ,  H01L041/04 ,  H01L041/08 ,  H01L041/18

CPC分类号： H03H9/1071 ,  H01L2224/97 ,  H03H3/08

摘要： A method of fabricating a surface acoustic wave device includes the steps of: joining a supporting substrate to a second surface of a piezoelectric substrate opposite to a first surface thereof; grinding and polishing the first surface of the piezoelectric substrate; grinding and polishing a third surface of the supporting substrate opposite to another surface thereof to which the second surface of the piezoelectric substrate is joined; and forming, on the first surface of the piezoelectric substrate, an on-chip pattern including comb-like electrodes and electrode pads.

摘要翻译： 一种表面声波器件的制造方法，其特征在于，包括以下工序：将支撑基板与压电基板的与其第一面相反的第二面接合; 研磨和抛光压电基片的第一表面; 研磨和抛光与压电基板的第二表面接合的其他表面相对的支撑基板的第三表面; 以及在压电基板的第一表面上形成包括梳状电极和电极焊盘的片上图案。

公开(公告)号：US20040251990A1

公开(公告)日：2004-12-16

申请号：US10823648

申请日：2004-04-14

申请人： FUJITSU MEDIA DEVICES LIMITED ,  FUJITSU LIMITED

发明人： Masanori Ueda ,  Osamu Kawachi ,  Shogo Inoue ,  Jun Tsutsumi ,  Takashi Matsuda ,  Yoshio Satoh

IPC分类号： H03H009/64

CPC分类号： H03H9/6436 ,  H03H9/14538 ,  H03H9/25 ,  H03H9/6433 ,  H03H9/6489

摘要： Efficient transverse energy confinement, and provision of a surface acoustic wave filter having preferable characteristics of both insertion loss and shape factor are obtained. In the surface acoustic wave filter, electrode fingers of one comb electrode are laid in a state of being inserted to the electrode fingers of the other comb electrode, and a thick film thicker than each plurality of electrode fingers is produced in a partial area of the bus bar, and a tip gap is provided between the top of each plurality of electrode fingers and the end face of the opposed bus bar, with a distance therebetween set not greater than 0.2null (where, null is one period of the comb electrode).

摘要翻译： 获得有效的横向能量限制，并且提供具有插入损耗和形状系数都优选的特性的表面声波滤波器。 在表面声波滤波器中，一个梳状电极的电极指状物被插入到另一梳状电极的电极指的状态，并且在该多个电极指的部分区域中产生厚于多个电极指的厚膜 汇流条，并且在每个多个电极指的顶部和相对的母线的端面之间设置有尖端间隙，其间的距离设置为不大于0.2λ（其中，λ是梳状电极的一个周期） 。

公开(公告)号：US20020079988A1

公开(公告)日：2002-06-27

申请号：US10082054

申请日：2002-02-26

申请人： FUJITSU MEDIA DEVICES LIMITED

发明人： Gou Endou ,  Osamu Kawachi ,  Masanori Ueda ,  Motoyuki Tajima

IPC分类号： H03H009/64

CPC分类号： H03H9/0042 ,  H03H9/0028 ,  H03H9/0061 ,  H03H9/1455 ,  H03H9/14591

摘要： A surface acoustic wave device includes an input interdigital transducer and an output interdigital transducer, disposed on a surface acoustic wave propagation path of a piezoelectric substrate, wherein when an aperture length of an electrode finger of the input or output interdigital transducer is denoted by X, the output or input interdigital transducer has two divided interdigital transducers having the electrode finger in which each aperture length is denoted by substantially X/2, wherein the two divided interdigital transducers are serial-connected, and the electrodes of the respective electrode fingers are led from the two divided interdigital transducers, and are disposed so that two output and input signals connected to a balance terminal pair have a different phase at 180null.

摘要翻译： 表面声波装置包括设置在压电基片的表面声波传播路径上的输入叉指式换能器和输出叉指式换能器，其中当输入或输出叉指式换能器的电极指的孔径长度由X表示时， 输出或输入叉指式换能器具有两个具有电极指的划分的叉指式换能器，其中每个孔径长度基本上由X / 2表示，其中两个划分的叉指式换能器串联连接，并且各个电极指的电极从 两个划分的叉指式换能器，并且被布置成使得连接到平衡端子对的两个输出和输入信号在180°处具有不同的相位。

公开(公告)号：US20040245891A1

公开(公告)日：2004-12-09

申请号：US10860248

申请日：2004-06-04

申请人： Fujitsu Media Devices Limited

发明人： Osamu Kawachi ,  Yoshiro Fujiwara

IPC分类号： H01L041/053

CPC分类号： H03H9/1071 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/16195 ,  H03H3/08 ,  H03H9/02921 ,  H03H9/0538 ,  H03H9/6483 ,  H03H9/725 ,  Y10T29/42 ,  Y10T29/49147 ,  H01L2924/00014

摘要： A surface acoustic wave device includes: interdigital transducers; first electrode pads that are connected to the interdigital transducers through wire patterns; and a piezoelectric substrate on which the interdigital transducers, the first electrode pads, and the wire patterns, are formed. In this surface acoustic wave device, at least one of the first electrode pads is not connected to a ground pattern, and the piezoelectric substrate has a conductivity in the range of 10null12/nullnullcm to 10null6/nullnullcm.

摘要翻译： 表面声波装置包括：叉指式换能器; 通过导线图案连接到叉指式换能器的第一电极焊盘; 以及其上形成有叉指换能器，第一电极焊盘和线图案的压电基板。 在该声表面波装置中，第一电极焊盘中的至少一个不连接到接地图案，压电基板的导电率为10〜12meV〜10 -6 / Omega.cm。

公开(公告)号：US20040222870A1

公开(公告)日：2004-11-11

申请号：US10863484

申请日：2004-06-09

申请人： FUJITSU MEDIA DEVICES LIMITED

发明人： Masanori Ueda ,  Osamu Kawachi ,  Motoyuki Tajima ,  Kenya Hashimoto ,  Takuya Abe

IPC分类号： H03H009/64

CPC分类号： H03H9/6469 ,  H03H9/0071 ,  H03H9/14535 ,  H03H9/6436 ,  H03H9/6476 ,  H03H9/6483

摘要： A surface acoustic wave filter capable of obtaining a low insertion loss and wide bandwidth characteristic is provided. The surface acoustic wave filter includes a piezoelectric substrate; a pair of reflective electrodes formed on the piezoelectric substrate; and a plurality of comb electrodes formed between the pair of reflective electrodes on the piezoelectric substrate, wherein, in regard to the neighboring two comb electrodes among the plurality of comb electrodes, an electrode pitch of one comb electrode is set so that continuously varying phases of surface acoustic waves respectively generated by the two comb electrodes are obtained in a gap opposite to an outermost finger electrode of the other neighboring comb electrode.

摘要翻译： 提供能够获得低插入损耗和宽带宽特性的表面声波滤波器。 声表面波滤波器包括压电基片; 形成在所述压电基板上的一对反射电极; 以及形成在所述压电基板上的所述一对反射电极之间的多个梳状电极，其中，对于所述多个梳状电极中的相邻的两个梳状电极，设置一个梳状电极的电极间距，使得连续变化的相位 在与另一个相邻的梳状电极的最外侧的指状电极相反的间隙中获得由两个梳状电极分别产生的表面声波。

公开(公告)号：US20020070822A1

公开(公告)日：2002-06-13

申请号：US09863443

申请日：2001-05-24

申请人： FUJITSU MEDIA DEVICES LIMITED

发明人： Yasufumi Kaneda ,  Masanori Ueda ,  Osamu Kawachi ,  Takuya Abe

IPC分类号： H03H009/64

CPC分类号： H03H9/6433

摘要： A surface acoustic wave filter is free from any loss arising from the impedance mismatching by finding out optimum values achieving a widened band and lowered loss for the electrode width of the interdigital transducer and reflector electrodes. The surface acoustic wave filter includes interdigital transducers and reflectors arranged on both sides of the transducer. The piezoelectric substrate has a ratio h/null of an electrode thickness h to a surface acoustic wave wavelength null lying within the range of 0.05nullh/nullnull0.15 and has an electrode width ratio wr/pr of a reflector electrode width wr to an electrode pitch pr lying within the range of 0.5nullwr/prnull0.6 and has an electrode width ratio wi/pi of an interdigital transducer interdigital electrode width wi to a pitch pi lying within the range of 0.6nullwi/pinull0.9.

摘要翻译： 表面声波滤波器通过找到实现扩宽带的最佳值和降低叉指式换能器和反射器电极的电极宽度的损耗而不受由阻抗失配引起的任何损失。 表面声波滤波器包括布置在换能器两侧的叉指换能器和反射器。 压电基板的电极厚度h与表面声波波长长度的比率h / lambd在0.05 <= h / lambd <= 0.15的范围内，并且具有反射器电极宽度wr的电极宽度比wr / pr 电极间距pr在0.5 <= wr / pr <= 0.6的范围内，并且具有叉指式换能器叉指电极宽度wi与间距p 1的电极宽度比wi / pi在0.6 <= wi / pi <= 0.9。