公开(公告)号：US20200294759A1

公开(公告)日：2020-09-17

申请号：US16299948

申请日：2019-03-12

申请人： FEI Company

发明人： Zhenxin Zhong

IPC分类号： H01J37/20 ,  H01J37/26

摘要： Various methods and systems are provided for aligning zone axis of a sample with an incident beam. As one example, the alignment may be based on a zone axis tilt. The zone axis tilt may be determined based on locations of a direct beam and a zero order Laue zone in the diffraction pattern. The direct beam location may be determined based on diffraction patterns acquired with different incident angles.

公开(公告)号：US20230317410A1

公开(公告)日：2023-10-05

申请号：US18128223

申请日：2023-03-30

申请人： FEI Company

发明人： Bingxing Wu ,  Zhenxin Zhong ,  Chunxiao Liu

IPC分类号： H01J37/305 ,  H01J37/28 ,  H01J37/244 ,  H01J37/26 ,  H01J37/22 ,  H01J37/20

CPC分类号： H01J37/3056 ,  H01J37/28 ,  H01J37/244 ,  H01J37/265 ,  H01J37/222 ,  H01J37/20 ,  H01J2237/31749

摘要： Multiple features in a sample are analyzed based on a first sample image of a first surface and a second sample image of a second surface. The first surface includes cross-sections of the multiple features, and the second surface includes cross-sections of the multiple features at different sample depths relative to the first surface. The second surface formed by milling the sample to remove at least a part of the first surface. A 3D model of the multiple features is constructed by comparing the cross-sections of multiple features in the second image and corresponding cross-sections of the multiple features in the first image.

公开(公告)号：US11694322B2

公开(公告)日：2023-07-04

申请号：US17177529

申请日：2021-02-17

申请人： FEI Company

发明人： Zhenxin Zhong ,  Hai Fe Gao ,  Ying Hong Lin ,  Ruixin Zhang ,  Bingxing Wu

IPC分类号： G06T7/00 ,  G06T7/33 ,  H01J37/28 ,  B23C3/00 ,  G06T7/73 ,  G06V10/25 ,  G06V10/40

CPC分类号： G06T7/0004 ,  B23C3/00 ,  G06T7/33 ,  G06T7/73 ,  G06V10/25 ,  G06V10/40 ,  H01J37/28 ,  G06T2207/10061 ,  G06T2207/30108 ,  G06T2207/30204

摘要： Methods and systems for milling and imaging a sample based on multiple fiducials at different sample depths include forming a first fiducial on a first sample surface at a first sample depth; milling at least a portion of the sample surface to expose a second sample surface at a second sample depth; forming a second fiducial on the second sample surface; and milling at least a portion of the second sample surface to expose a third sample surface including a region of interest (ROI) at a third sample depth. The location of the ROI at the third sample depth relative to the first fiducial may be calculated based on an image of the ROI and the second fiducial as well as relative position between the first fiducial and the second fiducial.

公开(公告)号：US11024480B2

公开(公告)日：2021-06-01

申请号：US16299948

申请日：2019-03-12

申请人： FEI Company

发明人： Zhenxin Zhong

IPC分类号： H01J37/26 ,  H01J37/295 ,  H01J37/20

摘要： Various methods and systems are provided for aligning zone axis of a sample with an incident beam. As one example, the alignment may be based on a zone axis tilt. The zone axis tilt may be determined based on locations of a direct beam and a zero order Laue zone in the diffraction pattern. The direct beam location may be determined based on diffraction patterns acquired with different incident angles.