公开(公告)号：US11975360B2

公开(公告)日：2024-05-07

申请号：US17936585

申请日：2022-09-29

Applicant: Exo Imaging, Inc.

Inventor： Haesung Kwon ,  Brian Bircumshaw ,  Sandeep Akkaraju

IPC: B06B1/06 ,  G01H11/08 ,  G01N29/24 ,  B06B1/02 ,  H10N30/20

CPC classification number: B06B1/0622 ,  G01H11/08 ,  G01N29/2406 ,  B06B1/0292 ,  H10N30/2047

Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.

公开(公告)号：US20220314275A1

公开(公告)日：2022-10-06

申请号：US17218656

申请日：2021-03-31

Applicant: eXo Imaging, Inc.

Inventor： Haesung Kwon ,  Brian Bircumshaw ,  Sandeep Akkaraju

IPC: B06B1/02 ,  B81B3/00 ,  G01H11/08 ,  G01N29/24

Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.

公开(公告)号：US11951512B2

公开(公告)日：2024-04-09

申请号：US17218656

申请日：2021-03-31

Applicant: eXo Imaging, Inc.

Inventor： Haesung Kwon ,  Brian Bircumshaw ,  Sandeep Akkaraju

IPC: B06B1/06 ,  G01H11/08 ,  G01N29/24 ,  B06B1/02 ,  H10N30/20

CPC classification number: B06B1/0622 ,  G01H11/08 ,  G01N29/2406 ,  B06B1/0292 ,  H10N30/2047

Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.

公开(公告)号：US20220314278A1

公开(公告)日：2022-10-06

申请号：US17364397

申请日：2021-06-30

Applicant: Exo Imaging, Inc.

Inventor： Haesung Kwon ,  Brian Bircumshaw ,  Sandeep Akkaraju

IPC: B06B1/06

Abstract: A micromachined ultrasonic transducer (MUT) which comprises a first piezoelectric layer and a second piezoelectric layer. The first piezoelectric layer is disposed between a first electrode and a second electrode. The second piezoelectric layer is disposed between the second electrode and a third electrode. At least the first electrode has first and second ends along a first axis, one or more of which is defined by a radius of curvature R. A second axis normal to the first passes through a midpoint of the first axis. A half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode. A total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape. R/L, is greater than 1.

公开(公告)号：US20220193722A1

公开(公告)日：2022-06-23

申请号：US17272910

申请日：2020-09-11

Applicant: eXo Imaging, Inc.

Inventor： Brian Lee Bircumshaw ,  Sandeep Akkaraju ,  Haesung Kwon

IPC: B06B1/06 ,  H01L41/047 ,  H01L41/083 ,  H01L41/08

Abstract: Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.

公开(公告)号：US11313717B2

公开(公告)日：2022-04-26

申请号：US17180308

申请日：2021-02-19

Applicant: eXo Imaging, Inc.

Inventor： Sandeep Akkaraju ,  Haesung Kwon ,  Brian Bircumshaw

IPC: G01H11/00 ,  H01L41/00 ,  G01H11/08 ,  G01S15/02 ,  G01N29/07 ,  H01G5/00 ,  H01L41/113 ,  H01L41/18 ,  B81B3/00

Abstract: A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.

公开(公告)号：US20210151661A1

公开(公告)日：2021-05-20

申请号：US17159538

申请日：2021-01-27

Applicant: eXo Imaging, Inc.

Inventor： Haesung Kwon ,  Brian Bircumshaw ,  Sandeep Akkaraju

IPC: H01L41/047 ,  B06B1/02 ,  B06B1/06 ,  H01L41/04 ,  H01L41/29

Abstract: Disclosed herein are ultrasonic transducer systems with hybrid contacts comprising: an ultrasonic transducer element comprising a substrate and a membrane; an electrical circuitry; and one or more contacts connected to the ultrasonic transducer element and the electrical circuitry, wherein the one or more contacts are: designed geometrically using a set of rules; arranged with respect to the membrane based on the set of rules or a second set of rules, or both.

公开(公告)号：US20190316958A1

公开(公告)日：2019-10-17

申请号：US15951121

申请日：2018-04-11

Applicant: EXO IMAGING INC.

Inventor： Sandeep Akkaraju ,  Haesung Kwon ,  Brian Bircumshaw

IPC: G01H11/08 ,  G01S15/02 ,  G01N29/07 ,  H01L41/18 ,  H01G5/00 ,  H01L41/113

Abstract: A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.

公开(公告)号：US20190316957A1

公开(公告)日：2019-10-17

申请号：US15951118

申请日：2018-04-11

Applicant: EXO IMAGING INC.

Inventor： Sandeep Akkaraju ,  Haesung Kwon ,  Brian Bircumshaw

IPC: G01H11/08 ,  H01L41/18 ,  H01L41/113 ,  G01N29/07 ,  G01S15/02

Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.

公开(公告)号：US12059708B2

公开(公告)日：2024-08-13

申请号：US17099545

申请日：2020-11-16

Applicant: eXo Imaging, Inc.

Inventor： Brian Bircumshaw ,  Sandeep Akkaraju ,  Haesung Kwon

IPC: B06B1/06 ,  B06B1/02 ,  G10K9/122

CPC classification number: B06B1/0253 ,  B06B1/0666 ,  G10K9/122 ,  B06B2201/30

Abstract: Disclosed herein are ultrasonic transducer systems comprising: an ultrasonic transducer comprising a substrate, a diaphragm, and a piezoelectric element; a first electrical circuitry coupled to the ultrasonic transducer, the first electrical circuitry configured for driving the ultrasonic transducer or detecting motion of the diaphragm; a plurality of electrical ports coupled to the ultrasonic transducer; and a second electrical circuitry connected to two or more of the plurality of electrical ports, the electrical circuitry comprising one or more of: a resistor, a capacitor, a switch, and an amplifier, wherein the second electrical circuitry is independent from the first electrical circuitry, and wherein the second electrical circuitry is configured to dampen the motion of the diaphragm.