Invention Application
- Patent Title: IMAGING DEVICES HAVING PIEZOELECTRIC TRANSCEIVERS
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Application No.: US15951121Application Date: 2018-04-11
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Publication No.: US20190316958A1Publication Date: 2019-10-17
- Inventor: Sandeep Akkaraju , Haesung Kwon , Brian Bircumshaw
- Applicant: EXO IMAGING INC.
- Applicant Address: US CA OAKLAND
- Assignee: EXO IMAGING INC.
- Current Assignee: EXO IMAGING INC.
- Current Assignee Address: US CA OAKLAND
- Main IPC: G01H11/08
- IPC: G01H11/08 ; G01S15/02 ; G01N29/07 ; H01L41/18 ; H01G5/00 ; H01L41/113

Abstract:
A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
Public/Granted literature
- US10648852B2 Imaging devices having piezoelectric transceivers Public/Granted day:2020-05-12
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