公开(公告)号：US09650238B2

公开(公告)日：2017-05-16

申请号：US14475487

申请日：2014-09-02

Applicant: Electronics and Telecommunications Research Institute

Inventor： In Bok Baek ,  Han Young Yu ,  Yark Yeon Kim ,  Young Jun Kim ,  Chang Geun Ahn ,  Yong Sun Yoon ,  Bong Kuk Lee ,  Ji Eun Lim ,  Won Ick Jang

IPC: B81B7/02 ,  B81C1/00 ,  B81B7/00 ,  H03H3/007 ,  H03H9/08 ,  H03H9/24 ,  H02N11/00

CPC classification number: B81B7/02 ,  B81B7/0006 ,  B81B7/0093 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/0307 ,  B81C1/00142 ,  B81C1/0019 ,  B81C1/0038 ,  B81C1/00539 ,  H02N11/002 ,  H03H3/0072 ,  H03H9/08 ,  H03H9/2463

Abstract: A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.