DUAL-SIDE MICRO GAS SENSOR AND METHOD OF FABRICATING THE SAME
    2.
    发明申请
    DUAL-SIDE MICRO GAS SENSOR AND METHOD OF FABRICATING THE SAME 有权
    双面微气体传感器及其制造方法

    公开(公告)号:US20140175570A1

    公开(公告)日:2014-06-26

    申请号:US13909477

    申请日:2013-06-04

    IPC分类号: H01L29/66

    CPC分类号: G01N27/128 G01N27/123

    摘要: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

    摘要翻译: 提供双面微气体传感器及其制造方法。 传感器可以包括弹性层,弹性层上的发热电阻层,发热电阻层上的层间绝缘层,层间绝缘层上的上感测层,以及设置在弹性层下方的下感测层 面对发热电阻层,从而减少发热电阻层的热损失。

    MICRO ELECTRO MECHANICAL SYSTEM CATALYTIC COMBUSTIBLE GAS SENSOR USING POROUS MEMBRANE EMBEDDED MICRO-HEATER
    7.
    发明申请
    MICRO ELECTRO MECHANICAL SYSTEM CATALYTIC COMBUSTIBLE GAS SENSOR USING POROUS MEMBRANE EMBEDDED MICRO-HEATER 审中-公开
    微电子机械系统催化可燃气体传感器使用多孔膜嵌入式微加热器

    公开(公告)号:US20140208838A1

    公开(公告)日:2014-07-31

    申请号:US13897293

    申请日:2013-05-17

    IPC分类号: G01M15/10

    CPC分类号: G01N27/16

    摘要: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

    摘要翻译: 提供了一种使用多孔膜嵌入式微型加热器和微机电系统(MEMS)技术的催化可燃气体传感器。 本公开提供了一种在结构上,机械上和电气上稳定的气体传感器,并且在MEMS催化可燃气体传感器中具有简单的装置制造工艺,其小型化并且还通过在多孔中刺穿多个孔而消耗极少量的功率 膜,加热电阻器和感测电极,通过蚀刻,从而通过多个孔将基板热隔离预定厚度,并且包括使用感测材料形成的感测结构和使用补偿材料形成的补偿结构。