HUMIDITY SENSOR
    1.
    发明申请

    公开(公告)号:US20220057354A1

    公开(公告)日:2022-02-24

    申请号:US17406786

    申请日:2021-08-19

    Abstract: A humidity sensor is provided. The humidity sensor includes a flexible substrate, a moisture absorption prevention layer covering the flexible substrate, a dielectric layer on the moisture absorption prevention layer, hydrophobic patterns on the dielectric layer, a first electrode between the moisture absorption prevention layer and the dielectric layer, and a second electrode spaced apart from the first electrode between the moisture absorption prevention layer and the dielectric layer. The first electrode has a thickness greater than that of the moisture absorption prevention layer.

    MICRO ELECTRO MECHANICAL SYSTEM(MEMS) ACOUSTIC SENSOR AND FABRICATION METHOD THEREOF
    2.
    发明申请
    MICRO ELECTRO MECHANICAL SYSTEM(MEMS) ACOUSTIC SENSOR AND FABRICATION METHOD THEREOF 审中-公开
    微电子机械系统(MEMS)声学传感器及其制造方法

    公开(公告)号:US20140061825A1

    公开(公告)日:2014-03-06

    申请号:US13873195

    申请日:2013-04-29

    Abstract: Provided are a micro electro mechanical system (MEMS) acoustic sensor for removing a nonlinear component that occurs due to a vertical motion of a lower electrode when external sound pressure is received by fixing the lower electrode to a substrate using a fixing pin, and a fabrication method thereof. The MEMS acoustic sensor removes an undesired vertical motion of a fixed electrode when sound pressure is received by forming a fixing groove on a portion of the substrate and then forming a fixing pin on the fixing groove, and fixing the fixed electrode to the substrate using the fixing pin, and thereby improves a frequency response characteristic and also improves a yield of a process by inhibiting thermal deformation of the fixed electrode that may occur during the process.

    Abstract translation: 提供了一种微机电系统(MEMS)声传感器,用于通过使用固定销将下电极固定到基板上来接收外部声压时,去除由于下电极的垂直运动而发生的非线性分量,以及制造 方法。 通过在基板的一部分上形成固定槽,然后在固定槽上形成固定销,并通过使用该固定电极将固定电极固定到基板上,MEMS声学传感器消除固定电极的不期望的垂直运动, 固定销,从而提高了频率响应特性,并且还通过抑制在该过程中可能发生的固定电极的热变形来提高工艺的产量。

    ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
    声学传感器及其制造方法

    公开(公告)号:US20130185928A1

    公开(公告)日:2013-07-25

    申请号:US13796018

    申请日:2013-03-12

    CPC classification number: H04R31/00 H04R19/005 H04R19/02

    Abstract: Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.

    Abstract translation: 提供了一种声学传感器。 声学传感器包括:基底,其包括侧壁部分和从侧壁部分的底部延伸的底部部分; 固定在所述基板上的下部电极,具有凹部和凸部,所述凹部包括在所述底部的中间区域的第一孔,所述凸部包括在所述底部的边缘区域上的第二孔; 隔膜面向下电极的凹部,其间具有振动空间; 隔膜支撑体设置在隔膜侧面的下电极上,具有与隔膜相同高度的顶表面; 以及设置在下部电极下方的底部和侧壁部之间的空间中的声学室。

    CAPACITOR-TYPE SENSOR READ-OUT CIRCUIT
    6.
    发明申请
    CAPACITOR-TYPE SENSOR READ-OUT CIRCUIT 审中-公开
    电容式传感器读出电路

    公开(公告)号:US20150131813A1

    公开(公告)日:2015-05-14

    申请号:US14304156

    申请日:2014-06-13

    CPC classification number: H03F1/0266 H03F3/211 H03F2200/411 H04R3/08

    Abstract: Provided is a capacitor-type sensor read-out circuit. The capacitor-type sensor read-out circuit includes: a signal conversion unit outputting a sensor signal inputted from a sensor; a voltage booster generating a bias voltage; and a capacitor-type signal coupling circuit receiving the sensor signal as a feedback, mixing the received sensor signal with the bias voltage, and outputting the mixed signal.

    Abstract translation: 提供了一种电容式传感器读出电路。 电容式传感器读出电路包括:信号转换单元,输出从传感器输入的传感器信号; 产生偏置电压的升压器; 接收传感器信号作为反馈的电容器型信号耦合电路,将接收到的传感器信号与偏置电压进行混合,并输出混合信号。

    ACOUSTIC SENSOR
    7.
    发明申请
    ACOUSTIC SENSOR 有权
    声学传感器

    公开(公告)号:US20150117680A1

    公开(公告)日:2015-04-30

    申请号:US14243755

    申请日:2014-04-02

    CPC classification number: H04R19/005 H04R2201/003

    Abstract: Provided are an acoustic sensor and a method of manufacturing the same. The acoustic sensor includes a substrate including an acoustic chamber, a first hole, and a second hole, penetrating the substrate, a lower electrode pad extended onto a top surface of the substrate while covering a sidewall of the first hole, a diaphragm pad extended onto the top surface of the substrate while covering a sidewall of the second hole, a lower electrode provided on the acoustic chamber and connected to the lower electrode pad, and a diaphragm above the lower electrode while being separated from the lower electrode and connected to the diaphragm pad.

    Abstract translation: 提供一种声传感器及其制造方法。 该声学传感器包括:衬底,包括穿透衬底的声学室,第一孔和第二孔;延伸到衬底顶表面上的下电极焊盘,同时覆盖第一孔的侧壁, 衬底的顶表面,同时覆盖第二孔的侧壁,设置在声学室上并连接到下电极焊盘的下电极,以及在与下电极分离并连接到隔膜的下电极之上的膜片 垫。

    MEMS MICROPHONE USING NOISE FILTER
    9.
    发明申请
    MEMS MICROPHONE USING NOISE FILTER 有权
    使用噪声滤波器的MEMS麦克风

    公开(公告)号:US20140079254A1

    公开(公告)日:2014-03-20

    申请号:US13762300

    申请日:2013-02-07

    CPC classification number: H04R3/00 H04R19/005 H04R2201/003 H04R2410/03

    Abstract: An MEMS microphone is provided which includes a reference voltage/current generator configured to generate a DC reference voltage and a reference current; a first noise filter configured to remove a noise of the DC reference voltage; a voltage booster configured to generate a sensor bias voltage using the DC reference voltage the noise of which is removed; a microphone sensor configured to receive the sensor bias voltage and to generate an output value based on a variation in a sound pressure; a bias circuit configured to receive the reference current to generate a bias voltage; and a signal amplification unit configured to receive the bias voltage and the output value of the microphone sensor to amplify the output value. The first noise filter comprises an impedance circuit; a capacitor circuit connected to a output node of the impedance circuit; and a switch connected to both ends of the impedance circuit.

    Abstract translation: 提供了一种MEMS麦克风,其包括被配置为产生DC参考电压和参考电流的参考电压/电流发生器; 第一噪声滤波器,被配置为去除所述直流参考电压的噪声; 升压器,被配置为使用其噪声被去除的直流参考电压来产生传感器偏置电压; 麦克风传感器,被配置为接收所述传感器偏置电压并且基于声压的变化产生输出值; 偏置电路,被配置为接收所述参考电流以产生偏置电压; 以及信号放大单元,被配置为接收麦克风传感器的偏置电压和输出值以放大输出值。 第一噪声滤波器包括阻抗电路; 连接到所述阻抗电路的输出节点的电容器电路; 以及连接到阻抗电路的两端的开关。

    STRAIN SENSOR AND FABRICATION METHOD THEREOF
    10.
    发明公开

    公开(公告)号:US20230236074A1

    公开(公告)日:2023-07-27

    申请号:US17941796

    申请日:2022-09-09

    CPC classification number: G01L1/18

    Abstract: Disclosed herein to a strain sensor and a method for fabricating the strain sensor. According to an embodiment of the present disclosure, there is provided a strain sensor. The strain sensor comprising: a stretchable piezoresistor formed by a composite of a conducting nanocarbon filler distributed within a matrix of an insulating elastomer; and a stretchable electrode which is formed by a composite of a metal filler distributed within the matrix of the insulating elastomer and is partially inserted into both ends of the stretchable piezoresistor, wherein resistance increases due to a longitudinal tensile strain of the piezoresistor.

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