知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

10 条记录 (耗时 0.028 秒)

    Micro-mirror apparatus and production method therefor
    2.
    发明授权
    Micro-mirror apparatus and production method therefor 有权
    微镜装置及其制造方法

    公开(公告)号：US06431714B1

    公开(公告)日：2002-08-13

    申请号：US09972683

    申请日：2001-10-05

    申请人： Renshi Sawada ,  Eiji Higurashi ,  Tohru Maruno

    发明人： Renshi Sawada ,  Eiji Higurashi ,  Tohru Maruno

    IPC分类号： G02B7182

    CPC分类号： G02B26/0841 ,  Y10S359/904

    摘要： The micro-mirror apparatus of the invention has; a mirror 33, a plurality of torsion springs 35, 36 for supporting the mirror 33 so as to be tiltable relative to an upper substrate 27, a lower substrate 21 arranged facing a lower face of the mirror 33, a convex portion 34 provided on an upper face of the lower substrate 21 and a plurality of lower electrodes 22, 23 formed on an outer face of the convex portion 34. For the torsion spring 36, an aspect ratio of height/width in a cross-section perpendicular to a longitudinal direction thereof is at least 1.8.

    摘要翻译： 本发明的微镜装置具有： 反射镜33，多个扭转弹簧35,36，用于支撑反射镜33相对于上基板27倾斜;下基板21，其面对反射镜33的下表面设置;凸部34， 下基板21的上表面和形成在凸部34的外表面上的多个下电极22,23。对于扭簧36，垂直于纵向方向的横截面的高度/宽度的纵横比 至少为1.8。

    Sensor Unit and Biosensor
    3.
    发明申请
    Sensor Unit and Biosensor 有权
    传感器单元和生物传感器

    公开(公告)号：US20080097172A1

    公开(公告)日：2008-04-24

    申请号：US11667108

    申请日：2005-11-01

    申请人： Renshi Sawada ,  Eiji Higurashi

    发明人： Renshi Sawada ,  Eiji Higurashi

    IPC分类号： A61B5/00

    CPC分类号： A61B5/0261 ,  G01N21/49

    摘要： A highly miniaturized biosensor and a sensor unit, which can meet a demand for further miniaturization. With this invention, miniaturization is possible, and the number of production steps including those for assembling individual parts can be reduced. Accordingly, mass production will be possible, and cost reduction and high reliability will be achieved. A light emitting unit (21) and a light receiving unit (22) are disposed in a same recess (24) formed on a surface of a semiconductor substrate (23), and a light shielding cover substrate (27) having a first light guide section (25) and a second light guide section (26) is disposed on an upper side of the semiconductor substrate (23). Since the light receiving unit (22) is formed with arrayed light receiving elements (28), the same number of the second light guide sections (26) as the light receiving elements (28) are provided on the light shielding cover substrate (27), and the light receiving surfaces of the light receiving elements (28) are connected to one end of each of the second light guiding sections (26) so as to conform to each other without any gap.

    摘要翻译： 高度小型化的生物传感器和传感器单元，可满足进一步小型化的需求。 利用本发明，可以实现小型化，并且可以减少包括用于组装各个部件的生产步骤的数量。 因此，可以大量生产，并且将实现成本降低和高可靠性。 发光单元（21）和光接收单元（22）设置在形成在半导体衬底（23）的表面上的同一凹部（24）中，并且具有第一导光体 部分（25）和第二导光部分（26）设置在半导体衬底（23）的上侧。 由于光接收单元（22）形成有排列的光接收元件（28），所以在遮光盖基板（27）上设置与光接收元件（28）相同数量的第二导光部（26） ，并且光接收元件（28）的光接收表面连接到每个第二导光部分（26）的一端以便彼此相符而没有任何间隙。

    Sensor unit and biosensor
    4.
    发明授权
    Sensor unit and biosensor 有权
    传感器单元和生物传感器

    公开(公告)号：US08352003B2

    公开(公告)日：2013-01-08

    申请号：US11667108

    申请日：2005-11-01

    申请人： Renshi Sawada ,  Eiji Higurashi

    发明人： Renshi Sawada ,  Eiji Higurashi

    IPC分类号： A61B5/1455

    CPC分类号： A61B5/0261 ,  G01N21/49

    摘要： A highly miniaturized biosensor and a sensor unit, which can meet a demand for further miniaturization. With this invention, miniaturization is possible, and the number of production steps including those for assembling individual parts can be reduced. Accordingly, mass production will be possible, and cost reduction and high reliability will be achieved. A light emitting unit (21) and a light receiving unit (22) are disposed in a same recess (24) formed on a surface of a semiconductor substrate (23), and a light shielding cover substrate (27) having a first light guide section (25) and a second light guide section (26) is disposed on an upper side of the semiconductor substrate (23). Since the light receiving unit (22) is formed with arrayed light receiving elements (28), the same number of the second light guide sections (26) as the light receiving elements (28) are provided on the light shielding cover substrate (27), and the light receiving surfaces of the light receiving elements (28) are connected to one end of each of the second light guiding sections (26) so as to conform to each other without any gap.

    摘要翻译： 高度小型化的生物传感器和传感器单元，可满足进一步小型化的需求。 利用本发明，可以实现小型化，并且可以减少包括用于组装各个部件的生产步骤的数量。 因此，可以大量生产，并且将实现成本降低和高可靠性。 发光单元（21）和光接收单元（22）设置在形成在半导体衬底（23）的表面上的同一凹部（24）中，并且具有第一导光体 部分（25）和第二导光部分（26）设置在半导体衬底（23）的上侧。 由于光接收单元（22）形成有排列的光接收元件（28），所以在遮光盖基板（27）上设置与光接收元件（28）相同数量的第二导光部（26） ，并且光接收元件（28）的光接收表面连接到每个第二导光部分（26）的一端以便彼此相符而没有任何间隙。