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公开(公告)号:US4978379A
公开(公告)日:1990-12-18
申请号:US266304
申请日:1988-10-31
申请人: Renshi Sawada , Junji Watanabe
发明人: Renshi Sawada , Junji Watanabe
IPC分类号: H01L25/00 , H01L21/02 , H01L21/20 , H01L21/316 , H01L21/762 , H01L27/12
CPC分类号: H01L21/76264 , H01L21/31604 , H01L21/76275 , H01L21/76283
摘要: A method of manufacturing a semiconductor substrate includes the steps of performing flame electrolysis on a galss source with an oxyhydrogen flame, spray-depositing the resultant glass particles on a joint surface of a semiconductor substrate, placing another semiconductor substrate on the deposited glass particles and performing heat-treatment, and joining the two substrates by sintering the glass particles.
摘要翻译: 制造半导体衬底的方法包括以下步骤:在氢氧火焰下对galss源进行火焰电解,将所得玻璃微粒喷射沉积在半导体衬底的接合表面上,将另一半导体衬底放置在沉积的玻璃颗粒上并执行 热处理,并通过烧结玻璃颗粒来接合两个基板。
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公开(公告)号:US20170160104A1
公开(公告)日:2017-06-08
申请号:US15300579
申请日:2015-03-31
发明人: Renshi SAWADA , Toshihiro TAKESHITA , Takuma IWASAKI , Masanori ISHIKAWA , Chihiro OKAMOTO , Tomohide AOYAGI
CPC分类号: G01D5/3473 , G01B9/00 , G01D5/34715 , G01D5/38
摘要: Disclosed is a reflective encoder which is capable of measuring movement amount and detecting movement direction by using one emergent light beam, and achieving high reliability and miniaturization through a simple structure. In the reflective encoder, a light beam emitted by a laser oscillator is caused to be incident on a reflective diffraction grating disposed on a side of a scale, and diffracted light beams reflected by the reflective diffraction grating are received by light receiving elements. An interference optical system is provided between the light receiving elements and the reflective diffraction grating. An optical system is thus constructed to measure movement amount and detect movement direction by using only one emergent light beam.
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公开(公告)号:US08352003B2
公开(公告)日:2013-01-08
申请号:US11667108
申请日:2005-11-01
申请人: Renshi Sawada , Eiji Higurashi
发明人: Renshi Sawada , Eiji Higurashi
IPC分类号: A61B5/1455
CPC分类号: A61B5/0261 , G01N21/49
摘要: A highly miniaturized biosensor and a sensor unit, which can meet a demand for further miniaturization. With this invention, miniaturization is possible, and the number of production steps including those for assembling individual parts can be reduced. Accordingly, mass production will be possible, and cost reduction and high reliability will be achieved. A light emitting unit (21) and a light receiving unit (22) are disposed in a same recess (24) formed on a surface of a semiconductor substrate (23), and a light shielding cover substrate (27) having a first light guide section (25) and a second light guide section (26) is disposed on an upper side of the semiconductor substrate (23). Since the light receiving unit (22) is formed with arrayed light receiving elements (28), the same number of the second light guide sections (26) as the light receiving elements (28) are provided on the light shielding cover substrate (27), and the light receiving surfaces of the light receiving elements (28) are connected to one end of each of the second light guiding sections (26) so as to conform to each other without any gap.
摘要翻译: 高度小型化的生物传感器和传感器单元,可满足进一步小型化的需求。 利用本发明,可以实现小型化,并且可以减少包括用于组装各个部件的生产步骤的数量。 因此,可以大量生产,并且将实现成本降低和高可靠性。 发光单元(21)和光接收单元(22)设置在形成在半导体衬底(23)的表面上的同一凹部(24)中,并且具有第一导光体 部分(25)和第二导光部分(26)设置在半导体衬底(23)的上侧。 由于光接收单元(22)形成有排列的光接收元件(28),所以在遮光盖基板(27)上设置与光接收元件(28)相同数量的第二导光部(26) ,并且光接收元件(28)的光接收表面连接到每个第二导光部分(26)的一端以便彼此相符而没有任何间隙。
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公开(公告)号:US07128716B2
公开(公告)日:2006-10-31
申请号:US10061602
申请日:2002-02-01
申请人: Eiji Higurashi , Renshi Sawada , Takahiro Ito
发明人: Eiji Higurashi , Renshi Sawada , Takahiro Ito
CPC分类号: A61B5/0261 , A61B5/0002 , G01F1/661
摘要: A sensor part of a blood flowmeter for measuring a value on blood flow in tissue of a living body is provided, in which the sensor part includes: a light emitter for emitting light to tissue of a living body; and a light detector for receiving scattered light from the tissue; a first shading block for preventing light emitted from the light emitter from directly entering the light detector; a second shading block having a predetermined gap in front of the light detector, wherein the light emitter, the light detector and the shading blocks are integrated on a semiconductor substrate.
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公开(公告)号:US5113071A
公开(公告)日:1992-05-12
申请号:US682144
申请日:1991-04-08
申请人: Renshi Sawada , Hidenao Tanaka , Osamu Ohguchi , Junichi Shimada
发明人: Renshi Sawada , Hidenao Tanaka , Osamu Ohguchi , Junichi Shimada
IPC分类号: G01D5/38
CPC分类号: G01D5/38
摘要: An encoder includes a semiconductor laser capable of emitting two coherent light beams from two end faces thereof, respectively. The end faces of the semiconductor laser are arranged such that the coherent light beams intersect each other. The two coherent light beams emitted from the end faces of the semiconductor laser are incident on a scale having a plurality of gratings. The two coherent light beams are diffracted by the gratings, resulting in two diffracted light beams. The two diffracted light beams interfere with each other, and the intensity of the resultant interference light beam is detected by a detector. In response to this detection, the detector produces a signal corresponding to the intensity change which is proportional to the relative moving distance between the detector and the scale.
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公开(公告)号:US20080097172A1
公开(公告)日:2008-04-24
申请号:US11667108
申请日:2005-11-01
申请人: Renshi Sawada , Eiji Higurashi
发明人: Renshi Sawada , Eiji Higurashi
IPC分类号: A61B5/00
CPC分类号: A61B5/0261 , G01N21/49
摘要: A highly miniaturized biosensor and a sensor unit, which can meet a demand for further miniaturization. With this invention, miniaturization is possible, and the number of production steps including those for assembling individual parts can be reduced. Accordingly, mass production will be possible, and cost reduction and high reliability will be achieved. A light emitting unit (21) and a light receiving unit (22) are disposed in a same recess (24) formed on a surface of a semiconductor substrate (23), and a light shielding cover substrate (27) having a first light guide section (25) and a second light guide section (26) is disposed on an upper side of the semiconductor substrate (23). Since the light receiving unit (22) is formed with arrayed light receiving elements (28), the same number of the second light guide sections (26) as the light receiving elements (28) are provided on the light shielding cover substrate (27), and the light receiving surfaces of the light receiving elements (28) are connected to one end of each of the second light guiding sections (26) so as to conform to each other without any gap.
摘要翻译: 高度小型化的生物传感器和传感器单元,可满足进一步小型化的需求。 利用本发明,可以实现小型化,并且可以减少包括用于组装各个部件的生产步骤的数量。 因此,可以大量生产,并且将实现成本降低和高可靠性。 发光单元(21)和光接收单元(22)设置在形成在半导体衬底(23)的表面上的同一凹部(24)中,并且具有第一导光体 部分(25)和第二导光部分(26)设置在半导体衬底(23)的上侧。 由于光接收单元(22)形成有排列的光接收元件(28),所以在遮光盖基板(27)上设置与光接收元件(28)相同数量的第二导光部(26) ,并且光接收元件(28)的光接收表面连接到每个第二导光部分(26)的一端以便彼此相符而没有任何间隙。
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公开(公告)号:US4860276A
公开(公告)日:1989-08-22
申请号:US97560
申请日:1987-09-16
申请人: Hiroo Ukita , Yoshitada Katagiri , Renshi Sawada , Yuuji Uenishi , Yoshihiro Isomura , Tomoyuki Toshima , Keisuke Mise
发明人: Hiroo Ukita , Yoshitada Katagiri , Renshi Sawada , Yuuji Uenishi , Yoshihiro Isomura , Tomoyuki Toshima , Keisuke Mise
IPC分类号: G11B7/12 , G11B7/125 , G11B7/13 , H01S3/00 , H01S5/00 , H01S5/026 , H01S5/065 , H01S5/10 , H01S5/14 , H01S5/40
CPC分类号: G11B7/127 , G11B7/122 , G11B7/13 , H01S5/10 , H01S5/14 , H01S3/005 , H01S5/0028 , H01S5/005 , H01S5/0262 , H01S5/065 , H01S5/4031
摘要: A micro optical head, for optically reading and/or writing digital data on a recording medium in which digital data 1 and 0, corresponding to a high reflection factor and a low reflection factor, is composed of a self-coupled semiconductor laser located close to the recording medium. A bias current of the laser is determined so that it is smaller than a first threshold current, in which the medium has a low reflection factor, and is higher than a second threshold current, in which the medium has a high reflection factor. Output light of the laser is either strong stimulated emission light, corresponding to the high reflection factor, or weak spontaneous emission light, corresponding to the low reflection factor. The present head is carried on a flying slider with a spacing length less than several .mu.m which provides a small beam spot of about 1 .mu.m, and has an excellent signal to noise ratio. A photodetector for sensing the output of the laser may be carried on the same semiconductor substrate as that of the laser.
摘要翻译: 一种微光学头,用于在记录介质上光学读取和/或写入数字数据,其中对应于高反射因数和低反射系数的数字数据1和0由接近于...的自耦半导体激光器组成 记录介质。 确定激光器的偏置电流,使得其小于第一阈值电流,其中介质具有低反射系数,并且高于其中介质具有高反射系数的第二阈值电流。 激光的输出光是对应于低反射因子的强激发光,对应于高反射因子或弱自发发光。 当前的头部承载在间隔长度小于几μm的飞行滑块上,其提供约1μm的小束斑,具有优异的信噪比。 用于感测激光器的输出的光电检测器可以在与激光器相同的半导体衬底上承载。
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公开(公告)号:US20110112386A1
公开(公告)日:2011-05-12
申请号:US13001320
申请日:2009-06-22
申请人: Takeshi Maki , Toshihisa Shimo , Kyoto Kumagai , Hidetaka Hayashi , Hideo Yanagisawa , Yusuke Tsutsui , Renshi Sawada , Wataru Iwasaki
发明人: Takeshi Maki , Toshihisa Shimo , Kyoto Kumagai , Hidetaka Hayashi , Hideo Yanagisawa , Yusuke Tsutsui , Renshi Sawada , Wataru Iwasaki
IPC分类号: A61B6/00
CPC分类号: A61B5/14532 , A61B5/14546 , A61B5/1455 , G01N21/314 , G01N21/359 , G01N33/4833 , G01N33/49 , G01N2021/3148 , G01N2201/0627
摘要: The present invention provides a noninvasive alcohol sensor that measures ethanol concentration with high accuracy by suppressing error dependent on glucose concentration. An alcohol sensor 10 includes first light-emitting means 21, second light-emitting means 22 and third light-emitting means 23. The first light-emitting means 21 radiates light having a wavelength of 1185 nm. This wavelength of 1185 nm is a wavelength at which the light absorbance of water and the light absorbance of ethanol are equal. The second light-emitting means 22 radiates light having a wavelength of 1710 nm. The third light-emitting means 23 radiates light having a wavelength of 1750 nm. Light detection means 30 detects the intensity of each light, and control means 60 calculates ethanol concentration based on the detected light intensity.
摘要翻译: 本发明提供一种通过抑制依赖于葡萄糖浓度的误差而以高精度测量乙醇浓度的无创酒精传感器。 醇传感器10包括第一发光装置21,第二发光装置22和第三发光装置23.第一发光装置21辐射波长为1185nm的光。 1185nm的波长是水的吸光度和乙醇的吸光度相等的波长。 第二发光装置22辐射波长为1710nm的光。 第三发光装置23辐射波长为1750nm的光。 光检测装置30检测每个光的强度,并且控制装置60基于检测到的光强度计算乙醇浓度。
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公开(公告)号:US20100056887A1
公开(公告)日:2010-03-04
申请号:US12516080
申请日:2006-11-26
申请人: Yoshinori Kimura , Atsushi Onoe , Renshi Sawada
发明人: Yoshinori Kimura , Atsushi Onoe , Renshi Sawada
IPC分类号: A61B5/1455 , A61B5/0265
CPC分类号: A61B5/0261 , A61B5/02028 , A61B5/14546 , A61B5/14552 , A61B2562/0242 , G01N21/359 , G01N2021/3144
摘要: An emission sensor device includes a base (110), a light applying section (120) disposed on the base and adapted for applying light beams having different wavelengths to a subject in such a way that the light beams at least overlap with one another, and a light receiving section (150) disposed on the base and adapted for detecting light from the subject attributed to the applied light beams for each wavelength. The device has a small size and can collect predetermined types of information on the subject such as bioinformation with high accuracy.
摘要翻译: 发射传感器装置包括基座(110),设置在基座上的适用于对被摄体具有不同波长的光束的光施加部分(120),使得光束彼此至少重叠,以及 光接收部分(150),设置在所述基座上并且适用于检测来自所述被摄体的光,所述光归因于每个波长的所施加的光束。 该装置具有小尺寸并且可以高精度地收集关于对象的预定类型的信息,例如生物信息。
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公开(公告)号:US06431714B1
公开(公告)日:2002-08-13
申请号:US09972683
申请日:2001-10-05
申请人: Renshi Sawada , Eiji Higurashi , Tohru Maruno
发明人: Renshi Sawada , Eiji Higurashi , Tohru Maruno
IPC分类号: G02B7182
CPC分类号: G02B26/0841 , Y10S359/904
摘要: The micro-mirror apparatus of the invention has; a mirror 33, a plurality of torsion springs 35, 36 for supporting the mirror 33 so as to be tiltable relative to an upper substrate 27, a lower substrate 21 arranged facing a lower face of the mirror 33, a convex portion 34 provided on an upper face of the lower substrate 21 and a plurality of lower electrodes 22, 23 formed on an outer face of the convex portion 34. For the torsion spring 36, an aspect ratio of height/width in a cross-section perpendicular to a longitudinal direction thereof is at least 1.8.
摘要翻译: 本发明的微镜装置具有: 反射镜33,多个扭转弹簧35,36,用于支撑反射镜33相对于上基板27倾斜;下基板21,其面对反射镜33的下表面设置;凸部34, 下基板21的上表面和形成在凸部34的外表面上的多个下电极22,23。对于扭簧36,垂直于纵向方向的横截面的高度/宽度的纵横比 至少为1.8。
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