Multispectral imaging device and manufacturing method thereof

    公开(公告)号:US10249662B2

    公开(公告)日:2019-04-02

    申请号:US15816176

    申请日:2017-11-17

    Inventor: Zhongshou Huang

    Abstract: The present disclosure provides a multispectral imaging device, comprising the following layers and components arranged in sequence following a direction of incident light: a color filter layer, comprising a plurality of color filters transparent for specific wavebands; a first transparent electrode layer continuously formed in imaging area; a first conversion layer continuously formed in imaging area to convert visible light to electric signals; a first flat topography comprising plurality of pixel electrodes and with surface roughness less than 5 nm; a second conversion layer to convert NIR light to electric signals; and circuit components to process the electric signals. Benefit from the first continuous conversion layer formed on the flat topography, high light utilization, low spectral cross-talk, low dark current are achieved in the multispectral imaging device.

    Multispectral imaging device
    2.
    发明授权

    公开(公告)号:US10700118B2

    公开(公告)日:2020-06-30

    申请号:US16143397

    申请日:2018-09-26

    Inventor: Zhongshou Huang

    Abstract: A multispectral imaging device comprises a first photoelectric conversion module and a second photoelectric conversion module. The first photoelectric conversion module further includes a first photoelectric conversion layer located between a first conducting layer and a second conducting layer. The first conducting layer, coupled to a first constant potential, is configured to allow visible light and infrared light to pass through. The first photoelectric conversion layer is configured to convert the visible light into a first electrical signal. The second photoelectric conversion module, formed on a silicon substrate, is configured to receive the infrared light coming from the first photoelectric conversion module. The second photoelectric conversion layer located between a third conducting layer and a fourth conducting layer, wherein the third conducting layer is configured to allow the infrared light passing through, the second photoelectric conversion layer is configured to convert the infrared light into a second electrical signal.

    Multispectral imaging device
    5.
    发明授权

    公开(公告)号:US10418411B2

    公开(公告)日:2019-09-17

    申请号:US15815852

    申请日:2017-11-17

    Inventor: Zhongshou Huang

    Abstract: A multispectral imaging device comprises a hybrid semiconductor device of stacked type to separate different light wavebands in a three-dimensional space, said hybrid semiconductor device comprises: a first photodiode, to convert NIR light photons to electrons, said first photodiode forming a detecting array of infrared light image, said first photodiodes comprising a substrate and an depletion layer; and a second photodiode, arranged on said first photodiode, to convert visible light photons to electrons, said second photodiode forming a detecting array of visible light image. The multispectral imaging device provided by the present disclosure decreases the cross-talk between different photodiodes and increases the total performance.

    Multispectral imaging device and imaging system

    公开(公告)号:US10211252B2

    公开(公告)日:2019-02-19

    申请号:US15809010

    申请日:2017-11-10

    Inventor: Zhongshou Huang

    Abstract: The present disclosure provides a multispectral imaging device and imaging system. The multispectral imaging device comprises: a substrate; a plurality of semiconductor layers, stacked on the substrate and arranged in a direction perpendicular to the substrate, different semiconductor layers converting visible light photons and NIR light photons to electrons, respectively; and a filtering layer, arranged on one side of the plurality of semiconductor layers away from the substrate, comprising a plurality of filtering sections arranged as a matrix, to separate the incident light to multiple wavebands on a plane parallel to the substrate. The multispectral imaging device and imaging system separate the incident light by waveband in a direction perpendicular to the substrate and a direction parallel to the substrate, then multispectral images can be acquired at the same time.

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