公开(公告)号：US20240053301A1

公开(公告)日：2024-02-15

申请号：US18254466

申请日：2021-11-09

Applicant: EVATEC AG

Inventor： Peter HORN ,  Edmund SCHÜNGEL ,  Adrian HERDE

IPC: G01N29/12 ,  G01N29/34 ,  H01J37/32 ,  C23C16/50 ,  C23C16/455

CPC classification number: G01N29/12 ,  G01N29/348 ,  G01N29/346 ,  H01J37/3244 ,  H01J37/32935 ,  C23C16/50 ,  C23C16/45536 ,  C23C16/45544 ,  G01N2291/0237 ,  H01J2237/332 ,  H01J2237/3323 ,  H01J2237/24578

Abstract: A measuring device for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited (under vacuum). The crystal includes two spaced-apart electrodes. A frequency generator is adapted to generate an oscillator signal at a specified output frequency. A measuring amplifier is adapted to apply the oscillator signal as a drive signal to one of the electrodes of the crystal and to provide a crystal output signal in response to the drive signal. A quadrature demodulator is adapted to down convert the crystal output signal and to provide an in-phase output signal and a quadrature output signal. A computation unit is adapted to determine one or more parameters of the crystal based on the in-phase output signal and the quadrature output signal. Furthermore, there is provided a corresponding measuring method as well as to thin-film deposition systems (including a vacuum chamber) with such a device and methods for controlling such systems.