公开(公告)号：US11269178B2

公开(公告)日：2022-03-08

申请号：US16668574

申请日：2019-10-30

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Eui Su Lee ,  Kyung Hyun Park ,  Il Min Lee ,  Kiwon Moon ,  Dong Woo Park ,  Hyun Soo Kim ,  Ho Jin Lee ,  Jeong Woo Park ,  Jun Hwan Shin ,  Kyeong Sun Choi ,  Dahye Choi

IPC: G02B26/08 ,  G02B26/12 ,  G02B26/10

Abstract: Provided are a polygon mirror assembly and a scan device. A polygon mirror assembly includes: a polygon mirror including a plurality of reflection surfaces spaced apart from a rotation axis by a predetermined distance; a first motor for rotating the polygon mirror around the rotation axis; a second motor for moving the polygon mirror in a first axial direction such that the rotation axis is tilted while the first motor rotates the polygon mirror; and a clock signal extraction surface for extracting a clock signal for detecting a change in a rotational speed of the first motor.

公开(公告)号：US11201250B2

公开(公告)日：2021-12-14

申请号：US16848826

申请日：2020-04-14

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Dong Woo Park ,  Kyung Hyun Park ,  Jeong Woo Park ,  Jun Hwan Shin ,  Eui Su Lee ,  Hyun Soo Kim ,  Kiwon Moon ,  Il Min Lee

IPC: H01L29/872 ,  H01L29/205 ,  H01L29/47 ,  H01L29/66 ,  H01L21/285 ,  H01L21/306

Abstract: A Schottky barrier diode includes a substrate, a first semiconductor layer formed on the substrate, a second semiconductor layer formed on the first semiconductor layer, and a metal layer formed on the second semiconductor layer to form a Schottky barrier, wherein the first semiconductor layer and the second semiconductor layer are formed of different materials, and a conduction band offset between the first semiconductor layer and the second semiconductor layer is less than a set value.

公开(公告)号：US10732045B2

公开(公告)日：2020-08-04

申请号：US16122486

申请日：2018-09-05

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sang-Pil Han ,  Jun Hwan Shin ,  Il Min Lee ,  Kyung Hyun Park

IPC: G01J3/453 ,  G02B27/14 ,  G01J3/06 ,  G02B5/02

Abstract: An image acquisition apparatus including a beam source, a beam expander, a beam splitter, an interferometer reference arm, a sample, a beam diffuser, a telecentric f-θ lens, a beam scanner, and a beam detector uses a terahertz wave to acquire a surface image and a depth image of the sample.