公开(公告)号：US12129841B2

公开(公告)日：2024-10-29

申请号：US17428918

申请日：2020-02-20

申请人： Edwards Limited

发明人： Gerald Robin Shelley ,  Peter George Stammers ,  Brian Stuart Blakeley Roberts

IPC分类号： F04B37/14 ,  F04B41/06 ,  F04B49/00 ,  F04B49/02 ,  F04B49/06 ,  F04B49/20 ,  F04B49/22 ,  F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C28/28 ,  F04D15/00 ,  F04D17/16 ,  F04D19/04 ,  F04D27/00 ,  F04D27/02

CPC分类号： F04B37/14 ,  F04B41/06 ,  F04B49/007 ,  F04B49/02 ,  F04B49/06 ,  F04B49/20 ,  F04B49/22 ,  F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C28/28 ,  F04D15/0027 ,  F04D17/168 ,  F04D19/04 ,  F04D27/004 ,  F04D27/0261 ,  F04B2205/09 ,  F04C2220/30

摘要： A vacuum pumping apparatus may include: a common pumping line having a plurality of pumping line inlets and a pumping line outlet, each pumping line inlet being configured to couple with an outlet of an associated plurality of vacuum processing chambers; at least one primary vacuum pump in fluid communication with the pumping line outlet to pump gas from each vacuum processing chamber; and control logic operable to control operation of the primary vacuum pump in response to an indication of an operating state of the plurality of vacuum processing chambers. In this way, the performance of the primary vacuum pump can be adjusted to match the load provided by the processing chambers and when there is an excess capacity, the performance of the primary vacuum pumps can be reduced, which can lead to significant energy savings and reduce wear on the pump.

公开(公告)号：US20220035349A1

公开(公告)日：2022-02-03

申请号：US17297302

申请日：2019-11-12

申请人： Edwards Limited

发明人： Peter Reginald Crundwell ,  Richard John Moran ,  Peter George Stammers ,  Steven Graham Barlow ,  Brent Haslett

IPC分类号： G05B19/418 ,  F04B37/14 ,  F04B49/06

摘要： A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

公开(公告)号：US11929982B2

公开(公告)日：2024-03-12

申请号：US17297302

申请日：2019-11-12

申请人： Edwards Limited

发明人： Peter Reginald Crundwell ,  Richard John Moran ,  Peter George Stammers ,  Steven Graham Barlow ,  Brent Haslett

IPC分类号： H04L61/5038 ,  F04B37/14 ,  F04B49/06 ,  G05B19/418 ,  G06F15/177

CPC分类号： H04L61/5038 ,  G05B19/41845 ,  G05B19/41855 ,  G06F15/177 ,  F04B37/14 ,  F04B49/065

摘要： A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

公开(公告)号：US20220090592A1

公开(公告)日：2022-03-24

申请号：US17428918

申请日：2020-02-20

申请人： EDWARDS LIMITED

发明人： Gerald Robin Shelley ,  Peter George Stammers ,  Brian Stuart Blakeley Roberts

IPC分类号： F04B37/14 ,  F04B41/06 ,  F04B49/00 ,  F04B49/02 ,  F04B49/06 ,  F04B49/20 ,  F04B49/22 ,  F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C28/28 ,  F04D15/00 ,  F04D17/16 ,  F04D19/04 ,  F04D27/00 ,  F04D27/02

摘要： A vacuum pumping apparatus may include: a common pumping line having a plurality of pumping line inlets and a pumping line outlet, each pumping line inlet being configured to couple with an outlet of an associated plurality of vacuum processing chambers; at least one primary vacuum pump in fluid communication with the pumping line outlet to pump gas from each vacuum processing chamber; and control logic operable to control operation of the primary vacuum pump in response to an indication of an operating state of the plurality of vacuum processing chambers. In this way, the performance of the primary vacuum pump can be adjusted to match the load provided by the processing chambers and when there is an excess capacity, the performance of the primary vacuum pumps can be reduced, which can lead to significant energy savings and reduce wear on the pump.