-
公开(公告)号：US20160052107A1
公开(公告)日：2016-02-25
申请号：US14823967
申请日：2015-08-11
申请人： EBARA CORPORATION
发明人： Yu ISHII , Hiroyuki KAWASAKI , Masayuki NAKANISHI , Kenya ITO , Kenji KODERA , Michiyoshi YAMASHITA
IPC分类号： B24D11/00
CPC分类号： B24D11/001 , B24B9/065 , B24B21/002 , B24B21/004 , B24B21/008 , B24B21/08 , B24B21/18 , B24B27/0076 , B24B49/12 , H01L21/304 , H01L21/3105
摘要： There is disclosed a method of polishing a peripheral portion of a wafer having a hard film with use of an abrasive film while preventing damage to the abrasive film. The polishing method uses an abrasive film including a base film made of polyimide, a binder made of polyimide, and abrasive grains held by the binder. The polishing method includes: rotating a silicon substrate having a surface on which a silicon carbide film is formed; and removing the silicon carbide film from a peripheral portion of the silicon substrate by pressing the abrasive film at a low force against the silicon carbide film on the peripheral portion of the silicon substrate.
摘要翻译： 公开了一种利用磨料膜研磨具有硬质膜的晶片的周边部分的方法，同时防止对研磨膜的损伤。 抛光方法使用包括由聚酰亚胺制成的基膜，由聚酰亚胺制成的粘合剂和由粘合剂保持的磨粒的研磨膜。 抛光方法包括：旋转具有形成有碳化硅膜的表面的硅衬底; 并且通过以低的力将研磨膜压在硅衬底的周边部分上的碳化硅膜上，从硅衬底的周边部分去除碳化硅膜。
-
公开(公告)号：US20140030962A1
公开(公告)日：2014-01-30
申请号：US13950066
申请日：2013-07-24
申请人： EBARA CORPORATION
发明人： Yu ISHII , Hiroyuki KAWASAKI , Masayuki NAKANISHI , Kenya ITO
IPC分类号： B24D11/00
CPC分类号： B24D11/003 , B05D5/02 , B24D11/00 , B24D11/001
摘要： A method for fabricating an abrasive firm includes preparing a base film, coating the base film with a first paint which contains no abrasive grain but contains a binder resin, and drying the paint to form a first layer. The method further includes coating the first layer with a second paint which contains the abrasive grains and the binder resin, and drying the paint to form a second layer. The method further includes heating the first layer and the second layer for imidization.
摘要翻译： 制造磨料制品的方法包括制备基膜，用不含磨粒但含有粘合剂树脂的第一涂料涂覆基膜，并干燥涂料以形成第一层。 该方法还包括用含有磨料颗粒和粘合剂树脂的第二种涂料涂覆第一层，并干燥涂料以形成第二层。 该方法还包括加热第一层和第二层以进行酰亚胺化。
-
公开(公告)号：US20220333615A1
公开(公告)日：2022-10-20
申请号：US17762437
申请日：2020-09-25
申请人： EBARA CORPORATION
发明人： Masaki WATANABE , Hiroyuki KAWASAKI , Shuyu HSU
摘要： A vertical multi-stage pump includes a rotation shaft extending in a vertical direction, a plurality of impellers fixed to the rotation shaft, a multi-stage pump chamber accommodating the plurality of impellers and comprising a suction port for a first-stage impeller at a lower end, a lower casing comprising a suction nozzle extending in a horizontal direction and forming a communication space communicating the suction nozzle and the suction port, and an inner cylinder member interposed between the multi-stage pump chamber and a lower casing and expanding the communication space in a vertical direction.
-
公开(公告)号：US20240167478A1
公开(公告)日：2024-05-23
申请号：US18282747
申请日：2022-01-05
申请人： EBARA CORPORATION
IPC分类号： F04D13/06 , F04D1/08 , F04D29/041 , F04D29/046 , F04D29/60
CPC分类号： F04D13/06 , F04D1/08 , F04D29/041 , F04D29/046 , F04D29/60
摘要： The present invention relates to a motor pump, a pump unit, and a method of balancing an impeller of the motor pump. The motor pump includes an impeller (1), a rotor (2), a stator (3), and a bearing (5). The rotor (2) and the bearing (5) are arranged in a suction side region (Ra) of the impeller (1).
-
公开(公告)号：US20220290675A1
公开(公告)日：2022-09-15
申请号：US17635082
申请日：2020-06-10
申请人： Ebara Corporation
发明人： Hiroyuki KAWASAKI , Takayuki MIYAMOTO , Miwa HIDEKURA , Hoechun KIM , Satoshi YAMAZAKI , Xinshuai FAN
摘要： The present invention relates to a pump apparatus for delivering a liquid. The pump apparatus includes a pump (1) having an impeller (5), an electric motor (7) for rotating the impeller (5), and an inverter (10) for driving the electric motor (7) at variable speed. The impeller (5) has a non-limit load characteristic in a predetermined discharge flow-rate range (R). The inverter (10) is configured to drive the electric motor (7) at a preset target operating point (TO) with a rotation speed higher than a rotation speed corresponding to a power frequency of a commercial power source.
-
公开(公告)号：US20210115940A1
公开(公告)日：2021-04-22
申请号：US17252932
申请日：2019-05-29
申请人： EBARA CORPORATION
IPC分类号： F04D29/42
摘要： The present invention relates to a reinforcing structure for a casing accommodating an impeller. A double-suction centrifugal pump includes: a rotational shaft (1); an impeller (2) secured to the rotational shaft (1); a casing (3) that accommodates the impeller (2) therein; and legs (5) secured to the casing (3). The casing (3) includes a suction volute (20) that communicates with a suction port (6), the casing (3) includes an upper casing (3a) and a lower casing (3b) fastened to each other, at least one rib (28A, 28B, 28C) is provided on each of both side surfaces of the lower casing (3b) constituting the suction volute (20), the rib (28A, 28B, 28C) extends in a radial direction of the rotational shaft (1) when viewed from an axial direction of the rotational shaft (1), and the rib (28A, 28B, 28C) is separated from the legs (5).
-
公开(公告)号：US20160318155A1
公开(公告)日：2016-11-03
申请号：US15163064
申请日：2016-05-24
申请人： EBARA CORPORATION
发明人： Yu ISHII , Hiroyuki KAWASAKI , Masayuki NAKANISHI , Kenya ITO
CPC分类号： B24D11/003 , B05D5/02 , B24D11/00 , B24D11/001
摘要： A method for fabricating an abrasive firm includes preparing a base film, coating the base film with a first paint which contains no abrasive grain but contains a binder resin, and drying the paint to form a first layer. The method further includes coating the first layer with a second paint which contains the abrasive grains and the binder resin, and drying the paint to form a second layer. The method further includes heating the first layer and the second layer for imidization.
摘要翻译： 制造磨料制品的方法包括制备基膜，用不含磨粒但含有粘合剂树脂的第一涂料涂覆基膜，并干燥涂料以形成第一层。 该方法还包括用含有磨料颗粒和粘合剂树脂的第二种涂料涂覆第一层，并干燥涂料以形成第二层。 该方法还包括加热第一层和第二层以进行酰亚胺化。
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.012 秒)
