公开(公告)号：US09801284B2

公开(公告)日：2017-10-24

申请号：US14944811

申请日：2015-11-18

Applicant: Dow Global Technologies LLC

Inventor： Tamara Dikic ,  Michael A. De Graaf ,  Christophe Brault ,  Stefan Prot ,  C A Torfs-Van Cotthem

IPC: B23B37/00 ,  C03C25/68 ,  C03C15/00 ,  C23F1/00 ,  H01L21/302 ,  H01L21/461 ,  H01L21/31 ,  H01L21/469 ,  H01L21/00 ,  H05K3/06 ,  H01G9/055 ,  C23F4/00 ,  C23F1/02 ,  H05K1/02 ,  H05K1/09 ,  H05K3/22

CPC classification number: H05K3/06 ,  C03C2218/33 ,  C23F1/02 ,  C23F4/00 ,  H01G9/055 ,  H05K1/0274 ,  H05K1/09 ,  H05K3/064 ,  H05K3/22 ,  H05K2201/0275

Abstract: A method of manufacturing a patterned conductor is provided, comprising: providing a substrate, comprising: a base material with an electrically conductive layer disposed thereon; providing an electrically conductive layer etchant; providing a spinning material, comprising: a carrier; and, a photosensitive masking material; providing a developer; forming a plurality of masking fibers and depositing them onto the electrically conductive layer to form a plurality of deposited fibers; patterning the plurality of deposited fibers to provide a treated fiber portion and an untreated fiber portion; developing the plurality of deposited fibers, wherein either the treated fiber portion or the untreated fiber portion is removed, leaving a patterned fiber array; contacting the electrically conductive layer to the electrically conductive layer etchant, wherein the electrically conductive layer that is uncovered by the patterned fiber array is removed, leaving a patterned conductive network on the substrate.