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公开(公告)号:US20230125666A1
公开(公告)日:2023-04-27
申请号:US17972976
申请日:2022-10-25
申请人: Daifuku Co., Ltd.
发明人: Kazuya Omori , Ryo Yamashita , Akihiro Yoshioka , Akira Masui , Hiroshi Otsuka
IPC分类号: H01L21/67
摘要: After the start of supply of a purge gas to a storage container, a supply rate control unit performs supply rate increase control to gradually increase the supply rate such that the supply rate reaches a first flow rate, and after the supply rate reaches the first flow rate, the supply rate control unit performs supply rate maintenance control to maintain the supply rate at the first flow rate or larger. A discharge rate control unit keeps a discharge rate at zero while the supply rate increase control is being executed, and when the supply rate reaches the first flow rate, the discharge rate control unit performs discharge rate maintenance control to maintain the discharge rate at or below a second flow rate smaller than the first flow rate.
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公开(公告)号:US12112966B2
公开(公告)日:2024-10-08
申请号:US17827202
申请日:2022-05-27
申请人: Daifuku Co., Ltd.
发明人: Kazuya Omori , Akira Masui
IPC分类号: H01L21/677 , B65G1/04 , B65G1/06
CPC分类号: H01L21/6773 , B65G1/0421 , H01L21/67769 , B65G1/0407 , B65G1/06 , B65G2201/0297 , Y10S414/14
摘要: A transfer machine raises and lowers a support portion in a transfer operation between a lower set position that is set below a placement portion of a transfer location subject to the transfer operation, and an upper set position that is set above the placement portion, and a control device changes setting of at least one of the lower set position and the upper set position to set a different raising/lowering range of the support portion that covers a range from the lower set position to the upper set position, between a case where an article is transferred to the transfer location provided in a storage/retrieval section, and a case where the article is transferred to the transfer location provided in accommodation sections.
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公开(公告)号:US20220380124A1
公开(公告)日:2022-12-01
申请号:US17827202
申请日:2022-05-27
申请人: Daifuku Co., Ltd.
发明人: Kazuya Omori , Akira Masui
摘要: A transfer machine raises and lowers a support portion in a transfer operation between a lower set position that is set below a placement portion of a transfer location subject to the transfer operation, and an upper set position that is set above the placement portion, and a control device changes setting of at least one of the lower set position and the upper set position to set a different raising/lowering range of the support portion that covers a range from the lower set position to the upper set position, between a case where an article is transferred to the transfer location provided in a storage/retrieval section, and a case where the article is transferred to the transfer location provided in accommodation sections.
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