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公开(公告)号:US20240269756A1
公开(公告)日:2024-08-15
申请号:US18567121
申请日:2022-05-27
Applicant: Dexerials Corporation
Inventor: Kazuhiko NODA , Katsuhiro DOI , Junichi SASAKI , Asahiko NOGAMI , Kyoko SAKURAI
CPC classification number: B23C3/02 , B29C33/3842 , B29C59/046 , B29K2033/04 , B29L2011/0016
Abstract: A roll manufacturing apparatus includes a rotary device including a rotary encoder, a cutting tool stage that holds a spindle unit, which includes a rotatable cutting blade, reciprocatably in a radial direction of a roll and is movable in the radial direction of the roll, a signal generator that generates, based on signals output from the rotary encoder, a control waveform indicating a movement pattern to reciprocate the cutting blade at positions corresponding to predetermined cutting portions, and a controller that moves the cutting tool stage so that a cutting process of reciprocating the cutting blade in the radial direction of the roll while rotating the cutting blade, according to the control waveform, to perform cutting once or multiple times with the cutting blade at a predetermined cutting depth is performed multiple times.
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公开(公告)号:US20190033721A1
公开(公告)日:2019-01-31
申请号:US16071984
申请日:2016-12-28
Applicant: Dexerials Corporation
Inventor: Asahiko NOGAMI
IPC: G03F7/20 , H01L21/027 , H01S3/106
Abstract: An exposure apparatus 10 is an exposure apparatus for forming a pattern by exposure by irradiating a set master 1 with laser light, comprising: an optical pickup 12 which is capable of adjusting the focus of laser light and a control unit 19 which adjusts the focus of laser light emitted from the optical pickup 12 using integrated surface profile data indicating the relative positional relationship between the surface of the master 1 and the optical pickup 12 according to at least one of the surface roughness of the master 1, the inclination of the master 1, and the decentering of the master 1.
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公开(公告)号:US20200094430A1
公开(公告)日:2020-03-26
申请号:US16574477
申请日:2019-09-18
Applicant: Dexerials Corporation
Inventor: Kazuhiko NODA , Katsuhiro DOI , Asahiko NOGAMI , Kyoko SAKURAI
Abstract: A new and improved microfabrication device, microfabrication method, transfer mold, and transfer object that can suppress a defect are provided. A microfabrication device comprises a tool mounting portion, a predetermined cutting tool, an oscillator, and a controller, wherein the controller performs a cutting process to satisfy at least one of: a cutting condition (1) that oscillations at a start point and an end point of each set are in phase with each other; and a cutting condition (2) that oscillations of the sets are in phase with each other.
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公开(公告)号:US20190211978A1
公开(公告)日:2019-07-11
申请号:US16335126
申请日:2017-09-27
Applicant: DEXERIALS CORPORATION
Inventor: Masanao KIKUCHI , Shunichi KAJIYA , Asahiko NOGAMI , Kyoko SAKURAI , Kazuya HAYASHIBE
Abstract: There is provided a new and improved optical body, a new and improved method for manufacturing an optical body, and a new and improved light emitting device that can emit light derived from a light source in more various manners. The optical body includes: a base material; and a first concave-convex structure that is formed on at least one surface of the base material and that extracts internally propagating light that is injected into an inside of the base material from a side surface of the base material. An average period of concavity and convexity of the first concave-convex structure is more than or equal to a minimum value of a visible light wavelength band and less than or equal to 10 μm.
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公开(公告)号:US20230045020A1
公开(公告)日:2023-02-09
申请号:US17937779
申请日:2022-10-04
Applicant: Dexerials Corporation
Inventor: Kazuhiko NODA , Katsuhiro DOI , Asahiko NOGAMI , Kyoko SAKURAI
Abstract: A transfer object comprises a substrate having one or more fine concave portions formed on a surface thereof. At least one of a sidewall and a bottom of each fine concave portion has an oscillation waveform satisfying at least one of the following oscillation waveform conditions: the oscillation waveform is continuous; the oscillation waveform is a composite waveform of a plurality of oscillation waveforms, and the plurality of oscillation waveforms are in phase with each other; fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of adjacent fine concave portions are in phase with each other; and fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of the fine concave portions are in phase with each other for every two pitches.
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公开(公告)号:US20230025421A1
公开(公告)日:2023-01-26
申请号:US17784685
申请日:2020-12-08
Applicant: DEXERIALS CORPORATION
Inventor: Kazuhiko NODA , Katsuhiro DOI , Kyoko SAKURAI , Asahiko NOGAMI , Mitsuo ARIMA
Abstract: A method for manufacturing a roll mold by cutting a roll, includes generating a control waveform based on a signal corresponding to a rotary position of the roll, and making a plurality of cuts on a surface of the roll by, while the roll is rotated, reciprocating a cutting blade in a radial direction of the roll in accordance with the control waveform. Making the plurality of cuts includes at each of a plurality of predetermined locations, making a predetermined number of cuts of predetermined depth based on the control waveform. Generating the control waveform includes generating a control waveform dictating that, when multiple cuts are made at a predetermined location, each subsequent cut will have a smaller depth than a preceding cut.
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公开(公告)号:US20230015044A1
公开(公告)日:2023-01-19
申请号:US17784695
申请日:2020-12-08
Applicant: DEXERIALS CORPORATION
Inventor: Kazuhiko NODA , Katsuhiro DOI , Kyoko SAKURAI , Asahiko NOGAMI , Mitsuo ARIMA
Abstract: A method for manufacturing a roll mold by cutting a roll, includes generating a control waveform based on a signal corresponding to a rotary position of the roll, and making a plurality of cuts on a surface of the roll by, while the roll is rotated, reciprocating a cutting blade in a radial direction of the roll in accordance with the control waveform. Making the plurality of cuts includes at each of a plurality of predetermined locations, making a predetermined number of cuts of predetermined depth based on the control waveform. Generating the control waveform includes generating a control waveform dictating that the predetermined locations, the predetermined depths, or both are randomly selected. Generating the control waveform includes generating a control waveform dictating that, when multiple cuts are made at a predetermined location, each subsequent cut will have a smaller depth than a preceding cut.
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公开(公告)号:US20220347879A1
公开(公告)日:2022-11-03
申请号:US17812445
申请日:2022-07-14
Applicant: Dexerials Corporation
Inventor: Kazuhiko NODA , Katsuhiro DOI , Asahiko NOGAMI , Kyoko SAKURAI
Abstract: A transfer mold comprises a substrate having one or more fine concave portions formed on a surface thereof. At least one of a sidewall and a bottom of each fine concave portion has an oscillation waveform satisfying at least one of the following oscillation waveform conditions: (1) the oscillation waveform is continuous; (2) the oscillation waveform is a composite waveform of a plurality of oscillation waveforms, and the plurality of oscillation waveforms are in phase with each other; (3) fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of adjacent fine concave portions are in phase with each other; and (4) fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of the fine concave portions are in phase with each other for every two pitches.
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公开(公告)号:US20220196884A1
公开(公告)日:2022-06-23
申请号:US17691527
申请日:2022-03-10
Applicant: DEXERIALS CORPORATION
Inventor: Shunichi KAJIYA , Asahiko NOGAMI , Kyoko SAKURAI , Kazuya HAYASHIBE
IPC: G02B1/118
Abstract: There is provided an optical body and a display device that enable wavelength dependence of a reflectance to be reduced and reflection of incident light to be further suppressed, the optical body including: a concave-convex structure formed on a surface of a base material. An average period of concavities and convexities of the concave-convex structure is equal to or shorter than a wavelength belonging to a visible light band. A standard deviation of differences between respective positions of bottom faces of the concavities of the concave-convex structure in a normal direction of a flat surface of the base material and a median of the positions of the bottom faces is greater than or equal to 25 nm.
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公开(公告)号:US20210053273A1
公开(公告)日:2021-02-25
申请号:US16955628
申请日:2018-12-18
Applicant: DEXERIALS CORPORATION
Inventor: Masanao KIKUCHI , Hiroshi TAZAWA , Asahiko NOGAMI , Kazuya HAYASHIBE
Abstract: Provided are a master in which a more complicated microstructure is formed, a transferred object obtained by using the master, and a method of producing the master. A plurality of concave-convex groups each including a plurality of concavities or convexities are provided on a base material apart from each other. Average widths of areas occupied by the concavities or convexities at a surface of the base material are smaller than or equal to a wavelength belonging to a visible light band. Formed lengths of the concavities or convexities from the surface of the base material in each of the concave-convex groups each belong to any of at least two or more groups having different central values.
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