EXPOSURE APPARATUS AND EXPOSURE METHOD
    2.
    发明申请

    公开(公告)号:US20190033721A1

    公开(公告)日:2019-01-31

    申请号:US16071984

    申请日:2016-12-28

    Inventor: Asahiko NOGAMI

    Abstract: An exposure apparatus 10 is an exposure apparatus for forming a pattern by exposure by irradiating a set master 1 with laser light, comprising: an optical pickup 12 which is capable of adjusting the focus of laser light and a control unit 19 which adjusts the focus of laser light emitted from the optical pickup 12 using integrated surface profile data indicating the relative positional relationship between the surface of the master 1 and the optical pickup 12 according to at least one of the surface roughness of the master 1, the inclination of the master 1, and the decentering of the master 1.

    TRANSFER OBJECT
    5.
    发明申请

    公开(公告)号:US20230045020A1

    公开(公告)日:2023-02-09

    申请号:US17937779

    申请日:2022-10-04

    Abstract: A transfer object comprises a substrate having one or more fine concave portions formed on a surface thereof. At least one of a sidewall and a bottom of each fine concave portion has an oscillation waveform satisfying at least one of the following oscillation waveform conditions: the oscillation waveform is continuous; the oscillation waveform is a composite waveform of a plurality of oscillation waveforms, and the plurality of oscillation waveforms are in phase with each other; fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of adjacent fine concave portions are in phase with each other; and fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of the fine concave portions are in phase with each other for every two pitches.

    TRANSFER MOLD
    8.
    发明申请

    公开(公告)号:US20220347879A1

    公开(公告)日:2022-11-03

    申请号:US17812445

    申请日:2022-07-14

    Abstract: A transfer mold comprises a substrate having one or more fine concave portions formed on a surface thereof. At least one of a sidewall and a bottom of each fine concave portion has an oscillation waveform satisfying at least one of the following oscillation waveform conditions: (1) the oscillation waveform is continuous; (2) the oscillation waveform is a composite waveform of a plurality of oscillation waveforms, and the plurality of oscillation waveforms are in phase with each other; (3) fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of adjacent fine concave portions are in phase with each other; and (4) fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of the fine concave portions are in phase with each other for every two pitches.

    OPTICAL BODY AND DISPLAY DEVICE
    9.
    发明申请

    公开(公告)号:US20220196884A1

    公开(公告)日:2022-06-23

    申请号:US17691527

    申请日:2022-03-10

    Abstract: There is provided an optical body and a display device that enable wavelength dependence of a reflectance to be reduced and reflection of incident light to be further suppressed, the optical body including: a concave-convex structure formed on a surface of a base material. An average period of concavities and convexities of the concave-convex structure is equal to or shorter than a wavelength belonging to a visible light band. A standard deviation of differences between respective positions of bottom faces of the concavities of the concave-convex structure in a normal direction of a flat surface of the base material and a median of the positions of the bottom faces is greater than or equal to 25 nm.

    MASTER, TRANSFERRED OBJECT, AND METHOD OF PRODUCING MASTER

    公开(公告)号:US20210053273A1

    公开(公告)日:2021-02-25

    申请号:US16955628

    申请日:2018-12-18

    Abstract: Provided are a master in which a more complicated microstructure is formed, a transferred object obtained by using the master, and a method of producing the master. A plurality of concave-convex groups each including a plurality of concavities or convexities are provided on a base material apart from each other. Average widths of areas occupied by the concavities or convexities at a surface of the base material are smaller than or equal to a wavelength belonging to a visible light band. Formed lengths of the concavities or convexities from the surface of the base material in each of the concave-convex groups each belong to any of at least two or more groups having different central values.

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