-
公开(公告)号：US20220224069A1
公开(公告)日：2022-07-14
申请号：US17614733
申请日：2020-05-21
申请人： Cymer, LLC
发明人： Yuda Wang , Rostislav Rokitski
摘要： An apparatus includes: abeam splitter on abeam path, the beam splitter configured to receive light from a deep ultraviolet (DUV) light source; and a first plurality of reflective optical elements on the beam path. The beam splitter is configured to direct a portion of the light received from the DUV light source toward the first plurality of reflective optical elements; the first plurality of reflective optical elements is configured to rotate a divergence of the portion of the light to produce rotated light; and the beam splitter is configured to direct the rotated light and a portion of the light received from the DUV light source onto an output beam path.
-
公开(公告)号：US20240030673A1
公开(公告)日：2024-01-25
申请号：US18265765
申请日：2021-12-09
申请人： Cymer, LLC
发明人： Changqi You , Paul Christopher Melcher , Yuda Wang
CPC分类号： H01S3/0912 , H01S3/2308 , H01S3/225 , H01S3/094076 , H01F27/24 , H01S2302/00
摘要： One or more properties of an electrical quantity are determined based on one or more operating characteristics of an optical system that includes a laser system; an impedance of a magnetic core of a magnetic switching network is adjusted by providing the electrical quantity to a coil that is magnetically coupled to the magnetic core; and after adjusting the impedance of the magnetic core, a pulse of light is produced. Producing the pulse of light includes: saturating the magnetic core such that an electrical pulse is provided to an excitation mechanism of the laser system.
-
3.发明公开公开(公告)号：US20240039234A1
公开(公告)日：2024-02-01
申请号：US18268378
申请日：2021-12-09
申请人： Cymer, LLC
发明人： Yuda Wang , Paul Christopher Melcher , Changqi You
CPC分类号： H01S3/09702 , H03K3/45 , H01F21/08 , G03F7/70025
摘要： A pulsed power circuit (30, 31, 32) including an inductor (55) having a hybrid core of a switch magnetic material arranged and selected to function as a magnetic switch a damping magnetic material arranged and selected to damp energy reflections without interfering with the switch magnetic material functioning as a magnetic switch so that the circuit can mitigate resonances caused by reflected energy without any significant degradation of its switching function as part of an saturable reactor inductor.
-
公开(公告)号：US20240283210A1
公开(公告)日：2024-08-22
申请号：US18568442
申请日：2022-06-06
申请人： Cymer, LLC
发明人： Paul Christopher Melcher , Yuda Wang , Changqi You
CPC分类号： H01S3/09702 , G03F7/2004 , G03F7/70025 , G03F7/70041 , H01S3/0835 , H01S3/2308 , H01S3/225 , H01S3/2366
摘要： A pulsed power circuit including one or more magnetic switches respectively implemented as one or more inductors having saturable cores wherein, after a discharge pulse, each saturable core is repeatably reset to an initial bias point on its magnetization curve by a reset pulse having variable characteristics determined, for example, by chamber operating conditions so that the saturable core is able to function reliably and consistently.
-
5.发明公开公开(公告)号：US20240222927A1
公开(公告)日：2024-07-04
申请号：US18556835
申请日：2022-04-04
申请人： Cymer, LLC
发明人： Paul Christopher Melcher , Yuda Wang , Changqi You
CPC分类号： H01S3/09702 , G03F7/2004 , G03F7/70025 , G03F7/70041 , G03F7/70525 , G03F7/7055 , H01S3/10007 , H01S3/2366 , H01S3/225
摘要： An apparatus includes: a magnetic switching network configured to activate an excitation mechanism in a discharge chamber. The magnetic switching network includes: an initial energy storage node configured to receive electrical current from an electrical charger; an additional energy storage node; and at least one electrical element between the initial energy storage node and the additional energy storage node. The apparatus also includes an electronic network electrically connected to the additional energy storage node, the electronic network configured to control a voltage at the additional energy storage node.
-
-
-
-
搜索结果
5 条记录 (耗时 0.013 秒)
