公开(公告)号：US11333897B2

公开(公告)日：2022-05-17

申请号：US16799370

申请日：2020-02-24

申请人： Coherent LaserSystems GMBH & Co. KG

发明人： Frank Simon ,  Ludwig Schwenger ,  Andrea Caprara

IPC分类号： G02B27/09 ,  G02B3/00

摘要： A beam homogenizer for transforming a beam of laser-radiation into a flat-top intensity distribution having brighter or darker edges comprises a first lens array, a second lens array, and a positive lens. The first lens array includes a plurality of lens elements that are separated by gaps having no optical power. Brighter or darker edges are produced by selecting a distance between the first and second lens arrays that is less than or greater than the focal length of lens elements in the second lens array.

公开(公告)号：US10247952B2

公开(公告)日：2019-04-02

申请号：US15001544

申请日：2016-01-20

申请人： COHERENT LASERSYSTEMS GMBH & CO. KG

发明人： Frank Simon ,  Thomas Wenzel ,  Ludwig Schwenger ,  Paul Van Der Wilt

IPC分类号： B23K26/06 ,  G02B27/09 ,  G02B27/28 ,  H01L21/02 ,  H01L27/12 ,  B23K103/00 ,  B23K26/067 ,  B23K26/073

摘要： In a laser line projection apparatus, six spaced-apart unpolarized laser-beams are plane-polarized with low loss by a combination of a thin-film polarizer, a reflector, and two polarization rotators. Two beams are polarized in each of three polarization-orientations. Two of the polarization-orientations are orthogonally aligned with each other in P and S orientations. The other polarization-orientation is non-orthogonally aligned in an intermediate orientation. The beams are intensity-homogenized and projected into a line of radiation. Any point on the line of radiation is formed from rays with an angular distribution of polarization-orientation from S to P through the intermediate orientation and back to S through the intermediate orientation.

公开(公告)号：US20160259174A1

公开(公告)日：2016-09-08

申请号：US15001544

申请日：2016-01-20

申请人： COHERENT LASERSYSTEMS GMBH & CO. KG

发明人： Frank Simon ,  Thomas Wenzel ,  Ludwig Schwenger

IPC分类号： G02B27/28 ,  B23K26/067 ,  B23K26/06

CPC分类号： G02B27/285 ,  B23K26/0604 ,  B23K26/0608 ,  B23K26/0648 ,  B23K26/067 ,  B23K26/0738 ,  B23K2103/56 ,  G02B27/0905 ,  G02B27/286 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02686 ,  H01L27/1285

摘要： In a laser line projection apparatus, six spaced-apart unpolarized laser-beams are plane-polarized with low loss by a combination of a thin-film polarizer, a reflector, and two polarization rotators. Two beams are polarized in each of three polarization-orientations. Two of the polarization-orientations are orthogonally aligned with each other in P and S orientations. The other polarization-orientation is non-orthogonally aligned in an intermediate orientation. The beams are intensity-homogenized and projected into a line of radiation. Any point on the line of radiation is formed from rays with an angular distribution of polarization-orientation from S to P through the intermediate orientation and back to S through the intermediate orientation.

摘要翻译： 在激光线投影装置中，六个间隔开的非偏振激光束通过薄膜偏振器，反射器和两个偏振旋转器的组合而具有低损耗的平面偏振。 两个光束在三个偏振取向中的每一个中极化。 两个偏振取向在P和S取向彼此正交对准。 另一种偏振取向在中间取向非正交对准。 梁被强度均匀化并投射到一条辐射线中。 辐射线上的任何点由具有从S到P通过中间取向的偏振取向的角度分布的射线形成，并且通过中间取向返回到S。