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    Helium Management Control System
    1.
    发明申请
    Helium Management Control System 有权
    氦管理控制系统

    公开(公告)号：US20150040596A1

    公开(公告)日：2015-02-12

    申请号：US14523507

    申请日：2014-10-24

    申请人： Brooks Automation, Inc.

    发明人： Paul E. Dresens ,  Gary S. Ash ,  Allen J. Bartlett ,  Bruce R. Andeen ,  Y. Roberto Than ,  Joseph Chopy, JR.

    IPC分类号： F04B37/08 ,  F17D3/18 ,  F17D1/04 ,  F17D3/01

    CPC分类号： F04B37/08 ,  B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F24F11/30 ,  F24F2110/50 ,  F25B9/002 ,  F25B9/14 ,  F25B45/00 ,  F25B2309/001 ,  F25B2309/002 ,  F25B2309/1428 ,  F25B2345/001 ,  F25B2345/003 ,  F25J1/0007

    摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply. An appropriate supply of helium is distributed to each cryopump. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

    摘要翻译： 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应。 向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。

    Helium management control system
    3.
    发明授权
    Helium management control system 有权

    公开(公告)号：US10288052B2

    公开(公告)日：2019-05-14

    申请号：US15143125

    申请日：2016-04-29

    申请人： Brooks Automation, Inc.

    发明人： Paul E. Dresens ,  Gary S. Ash ,  Allen J. Bartlett ,  Bruce R. Andeen ,  Y. Roberto Than ,  Joseph Chopy, Jr.

    IPC分类号： B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F25B9/00 ,  F25B9/14 ,  F25J1/00 ,  F04B37/08 ,  F24F11/30 ,  F25B45/00 ,  F24F110/50

    摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

    Helium Management Control System
    4.
    发明申请
    Helium Management Control System 审中-公开
    氦管理控制系统

    公开(公告)号：US20170002802A1

    公开(公告)日：2017-01-05

    申请号：US15143125

    申请日：2016-04-29

    申请人： Brooks Automation, Inc.

    发明人： Paul E. Dresens ,  Gary S. Ash ,  Allen J. Bartlett ,  Bruce R. Andeen ,  Y. Roberto Than ,  Joseph Chopy, JR.

    IPC分类号： F04B37/08 ,  F25B45/00 ,  F25B9/14 ,  B01D8/00 ,  F25B9/00

    CPC分类号： F04B37/08 ,  B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F24F11/30 ,  F24F2110/50 ,  F25B9/002 ,  F25B9/14 ,  F25B45/00 ,  F25B2309/001 ,  F25B2309/002 ,  F25B2309/1428 ,  F25B2345/001 ,  F25B2345/003 ,  F25J1/0007

    摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

    摘要翻译： 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过感应过多的稀疏氦和相应地重新分配制冷剂，向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。